operating_instructions_from_finetech_beamsplitter_alignment.pdf - 第4页

Focus Adjustments  Focus scale B scale B scale B scale B (use small knurled knob on left side of machine)  Focus scale A scale A scale A scale A (use z-height table adjustment)

Load the verniers

 Clean

B, and

tool

tool in IPA

 Place larger scale (A) on vacuum plate (pattern UP)

 Small scale on the tool (B), (pattern OUT)

Focus Adjustments

 Focus scale B

scale Bscale B

scale B

(use small

knurled knob on

left side of

machine)

 Focus scale A

scale Ascale A

scale A

(use z-height

table

adjustment)

Place the verniers

 Align the outer lines of

scales in both x and y

axes.

 Ensure that line #6 of A is

between lines 10 & 11 of B.

If not repeat

 When finished, only

outside lines of both scales

should directly overlap

(they are same distance

apart 200 µm)



Lower arm

Lower arm Lower arm

Lower arm -

-place A on B

place A on Bplace A on B

place A on B

 Be careful of vacuum

procedure – don’t release

head vacuum until well

positioned