SM411 Administrator’s Guide(Chi Ver1).pdf - 第290页

Samsung Component Placer SM41 1 Administrator ’ s Guide H1R-Z3: 后面 Gantry 󱍙 Head 3 󱍙 Z 󲱉 H1R-Z4: 后面 Gantry 󱍙 Head 4 󱍙 Z 󲱉 H1R-Z5: 后面 Gantry 󱍙 Head 5 󱍙 Z 󲱉 Gantry 󱍙 H Gantry 󱍙 Mirror 󲱉 H1R-R1: 后面 Gantry 󱍙 The…

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Machine Calibration
14-11
14.3.1. 󰶎
󲢓󳝆󲱉󱍙󱛐󱱃󱍙󳌥󲳞󰠹󳆃󰋋󰌓󱘏󱍙󲢲󰔛
14-1.
󱧐󱮴󰓜󰶎
&
󳌥
对话
<󱈊󰐏󲳞> 󱏃󰔛
󲳞󲙖󲢓󳌥󱍙󳝆󲱉󲳞󱍙󳝆󲱉
G1F-X: 󳐷 Gantry 󱍙 X󲱉
G1F-Y: 󳐷 Gantry 󱍙 Y󲱉
G1R-X: 后面 Gantry 󱍙 X󲱉
G1R-Y: 后面 Gantry 󱍙 Y󲱉
H1F-Z1: 󳐷 Gantry 󱍙 Head 1 󱍙 Z󲱉
H1F-Z2: 󳐷 Gantry 󱍙 Head 2 󱍙 Z󲱉
H1F-Z3: 󳐷 Gantry 󱍙 Head 3 󱍙 Z󲱉
H1F-Z4: 󳐷 Gantry 󱍙 Head 4 󱍙 Z󲱉
󱍙
Theta 󲱉 (H1, H2)
󳐷 Gantry 󱍙 Theta 󲱉 (H5, H6)
H1F-Z5: 󳐷 Gantry 󱍙 Head 5 󱍙 Z󲱉
H1F-Z6: 󳐷 Gantry 󱍙 Head 6 󱍙 Z󲱉
H1F-M1: 󳐷 Gantry 󱍙 Mirror 󲱉
H1F-R1: 󳐷 Gantry
H1F-R3: 󳐷 Gantry 󱍙 Theta 󲱉 (H3, H4)
H1F-R5:
H1R-Z1: 后面 Gantry 󱍙 Head 1 󱍙 Z󲱉
H1R-Z2: 后面 Gantry 󱍙 Head 2 󱍙 Z󲱉
Samsung Component Placer SM411 Administrators Guide
H1R-Z3: 后面 Gantry 󱍙 Head 3 󱍙 Z󲱉
H1R-Z4: 后面 Gantry 󱍙 Head 4 󱍙 Z󲱉
H1R-Z5: 后面 Gantry 󱍙 Head 5 󱍙 Z󲱉
Gantry 󱍙 H
Gantry 󱍙 Mirror 󲱉
H1R-R1: 后面 Gantry 󱍙 Theta 󲱉 (H7, H8)
H1R-R3: 后面 Gantry 󱍙 Theta 󲱉 (H9, H10)
H1R-R5: 后面 Gantry 󱍙 Theta 󲱉 (H11, H12)
STEF-W: Entry Shuttle 󱍙 conveyer 󲣘󱽗󳝁󲲓
STEF-S: Entry Shuttle 󱍙󱛐󳝁󲲓
ST1F-W󳐷 conveyer(F2)󱍙󲣘󱽗󳝁󲲓
ST1R-W: 后面 conveyer(R2)󱍙󲣘󱽗󳝁󲲓
STXF-W: Exit Shuttle 󱍙 conveyer 󲣘󱽗󳝁󲲓
STXF-S: Exit Shuttle 󱍙󱛐󳝁󲲓
<󲱄󳌥> 󳕛
<X-Y 󰓜󳌥󱺿󱍙󰒺...>
󳆃
󱺿󰒺 XY 󲱉󱍙
limit 󱕃󲡹󰌄󲲥󱇽󰏉
H1R-Z6: 后面 ead 6 󱍙 Z󲱉
H1R-M1: 后面
<󲔺> 󳆃
󲳞 Y 󲱉󰋋󲖀󰲕󰨐󲔡 Skew Compensation 󰋋󱇽󲢻󱮛󱍙󳕎󲣌󱳘
14.3.2
󰠿󰉱󰠸
<󰓶> 󳆃
󱺿󰒺<󱈊󰐏󲳞>󱏃󰔛󲳞󱍙󳝁󲲓 home 󱱃
<󰏞󰓜> 󳆃
󱺿󰒺󰏞󲱉 home 󱱃
14-12
Machine Calibration
14-13
<󰒺󳌥󰏞󰓜> 󳆃
󰏞󲱉󱍙󰑖󳌥
<Home Info.> 󳕛
󲳞 Mirror 󲱉󰋋<Home Offset>󱯫󲱦󰔛󲖀󰲕󰨐 Mirror 󲱉󲲰󲔡󰓶󰠸󰋋󱇽
<󰏉󰊅> 󳆃
󲳗󱇽󰏉
<󳋂> 󳆃
󳋂󲢲󰔛
󰦽
󲺢󰊅󰓶󰶎󱱃󰈎󰑱󲺢󰊅󱘏󰈮󱱃
ANC 󲨉󲖚󰶎󱠞󲢓󱱃󰏞󱍙󳕎󱏃󱻉󲢓
󰊅󰓶󳕐󲺢󰊅󱘏󰈮󱱃󰏞󱍙󳕎󱏃