SM411 Administrator’s Guide(Chi Ver1).pdf - 第291页

Machine Calibration 14-13  < 󰒺󳌥󰏞󰓜 > 󳆃 󰏞󲱉󱍙󰑖󳌥  <Home Info.> 󳕛 󲳞 Mirror 󲱉󰋋 <Home Offset> 󱯫󲱦󰔛󲖀󰲕󰨐 Mirror 󲱉󲲰󲔡󰓶󰠸󰋋󱇽   < 󰏉󰊅 > 󳆃 󲳗󱇽󰏉  < 󳋂 > …

100%1 / 401
Samsung Component Placer SM411 Administrators Guide
H1R-Z3: 后面 Gantry 󱍙 Head 3 󱍙 Z󲱉
H1R-Z4: 后面 Gantry 󱍙 Head 4 󱍙 Z󲱉
H1R-Z5: 后面 Gantry 󱍙 Head 5 󱍙 Z󲱉
Gantry 󱍙 H
Gantry 󱍙 Mirror 󲱉
H1R-R1: 后面 Gantry 󱍙 Theta 󲱉 (H7, H8)
H1R-R3: 后面 Gantry 󱍙 Theta 󲱉 (H9, H10)
H1R-R5: 后面 Gantry 󱍙 Theta 󲱉 (H11, H12)
STEF-W: Entry Shuttle 󱍙 conveyer 󲣘󱽗󳝁󲲓
STEF-S: Entry Shuttle 󱍙󱛐󳝁󲲓
ST1F-W󳐷 conveyer(F2)󱍙󲣘󱽗󳝁󲲓
ST1R-W: 后面 conveyer(R2)󱍙󲣘󱽗󳝁󲲓
STXF-W: Exit Shuttle 󱍙 conveyer 󲣘󱽗󳝁󲲓
STXF-S: Exit Shuttle 󱍙󱛐󳝁󲲓
<󲱄󳌥> 󳕛
<X-Y 󰓜󳌥󱺿󱍙󰒺...>
󳆃
󱺿󰒺 XY 󲱉󱍙
limit 󱕃󲡹󰌄󲲥󱇽󰏉
H1R-Z6: 后面 ead 6 󱍙 Z󲱉
H1R-M1: 后面
<󲔺> 󳆃
󲳞 Y 󲱉󰋋󲖀󰲕󰨐󲔡 Skew Compensation 󰋋󱇽󲢻󱮛󱍙󳕎󲣌󱳘
14.3.2
󰠿󰉱󰠸
<󰓶> 󳆃
󱺿󰒺<󱈊󰐏󲳞>󱏃󰔛󲳞󱍙󳝁󲲓 home 󱱃
<󰏞󰓜> 󳆃
󱺿󰒺󰏞󲱉 home 󱱃
14-12
Machine Calibration
14-13
<󰒺󳌥󰏞󰓜> 󳆃
󰏞󲱉󱍙󰑖󳌥
<Home Info.> 󳕛
󲳞 Mirror 󲱉󰋋<Home Offset>󱯫󲱦󰔛󲖀󰲕󰨐 Mirror 󲱉󲲰󲔡󰓶󰠸󰋋󱇽
<󰏉󰊅> 󳆃
󲳗󱇽󰏉
<󳋂> 󳆃
󳋂󲢲󰔛
󰦽
󲺢󰊅󰓶󰶎󱱃󰈎󰑱󲺢󰊅󱘏󰈮󱱃
ANC 󲨉󲖚󰶎󱠞󲢓󱱃󰏞󱍙󳕎󱏃󱻉󲢓
󰊅󰓶󳕐󲺢󰊅󱘏󰈮󱱃󰏞󱍙󳕎󱏃
Samsung Component Placer SM411 Administrators Guide
14.3.2. 󰠿󰉱󰠸
Skew 󱐕󲢓󱛐 Y1 Y2 󲱉 X 󲱉󱏉󰾋󲔺󱇴󱍙󰠿󰉱
󲲮󳰐󲢓󱍙󰏕󲖚󱛐󲔡 Y 󲱉󲔡󲒏󰢢󲔺󰊎󰦪;
󰏕󲢓󱍙󲖚󱛐
󰦽
󲔺>
󲔡󳕐󲔡 <󲒏󰢢
󲢓󳝆󱷒󰀴
󳙫X󰐏󰒋󱛐󲢓󱍙󳋉󲶽
󲣌󰶎<󰠿󰉱󰠸>󳆃󲵸󱺿Z󲱉󲔡Y1󲱉󱈊󰐏󰊠󲱁
󱒺Y Home󰠷󱛐 X 󰐏󰒋 Home 󱒺󰊎󱛐󱏍
Y󲱉󱛐󲪲󱚐󱒺Y󲱉Home󰠷󰊎󱛐
󰸋󰌓󱘏 Skew 󳋃󰌄󲳗󱇽󲢺
󰶎<󰌄(Y)>󳆃󰸼󲳗󱇽󱍙 Skew󲢓󲺢󰊅󲔡
14-14