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Date Page Name Tit le Panasonic PC System for Windows Program P8000CC 10/01/2007 71 BMV112A V01.12A ＊＊ＬＡＤＤ ＥＲ ＤＩＡＧＲＡＭ＊ ＊ 0412 1-01 CI001F S-AXIS CI006C S SCAN DIRECTION RL0C67 ENCODER COUN T 8 RL0C68 ENCODER COUNT 9 CO00…

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Date
Page
Name
Title
Panasonic
PC System for Windows
Program
P8000CC
10/01/2007
70
BMV112A
V01.12A
＊＊ＬＡＤＤＥＲ ＤＩＡＧＲＡＭ＊＊
0409
1-01
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C64
ENCODER
COUNT 5
RL0C65
ENCODER
COUNT 6
CO009D
MEAS START
ERR
RL0C36
DATA GET NOT
YET
RL0C38
THICK
END/ERROR2
OT0238
THICK MEAS
START
CO00C3
H4 DATA SET COMP
0400 *0409 0409
0417 0422
0409
1-02
CI006C
S SCAN
DIRECTION
RL0C65
ENCODER
COUNT 6
RL0C66
ENCODER
COUNT 7
0409
1-03
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C63
ENCODER
COUNT 4
RL0C64
ENCODER
COUNT 5
0409
1-04
CI006C
S SCAN
DIRECTION
RL0C68
ENCODER
COUNT 9
RL0C69
ENCODER
COUNT 10
0409
1-05
CO00C3
H4 DATA SET
COMP
0410
1-01
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C65
ENCODER
COUNT 6
RL0C66
ENCODER
COUNT 7
CO009D
MEAS START
ERR
RL0C36
DATA GET NOT
YET
RL0C38
THICK
END/ERROR2
OT0238
THICK MEAS
START
CO00C4
H5 DATA SET COMP
0400 0410 *0410
0418 0422
0410
1-02
CI006C
S SCAN
DIRECTION
RL0C64
ENCODER
COUNT 5
RL0C65
ENCODER
COUNT 6
0410
1-03
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C64
ENCODER
COUNT 5
RL0C65
ENCODER
COUNT 6
0410
1-04
CI006C
S SCAN
DIRECTION
RL0C67
ENCODER
COUNT 8
RL0C68
ENCODER
COUNT 9
0410
1-05
CO00C4
H5 DATA SET
COMP
0411
1-01
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C66
ENCODER
COUNT 7
RL0C67
ENCODER
COUNT 8
CO009D
MEAS START
ERR
RL0C36
DATA GET NOT
YET
RL0C38
THICK
END/ERROR2
OT0238
THICK MEAS
START
CO00C5
H6 DATA SET COMP
0400 0411 *0411
0419 0422
0411
1-02
CI006C
S SCAN
DIRECTION
RL0C63
ENCODER
COUNT 4
RL0C64
ENCODER
COUNT 5
0411
1-03
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C65
ENCODER
COUNT 6
RL0C66
ENCODER
COUNT 7
0411
1-04
CI006C
S SCAN
DIRECTION
RL0C66
ENCODER
COUNT 7
RL0C67
ENCODER
COUNT 8
0411
1-05
CO00C5
H6 DATA SET
COMP
Date
Page
Name
Title
Panasonic
PC System for Windows
Program
P8000CC
10/01/2007
71
BMV112A
V01.12A
＊＊ＬＡＤＤＥＲ ＤＩＡＧＲＡＭ＊＊
0412
1-01
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C67
ENCODER
COUNT 8
RL0C68
ENCODER
COUNT 9
CO009D
MEAS START
ERR
RL0C36
DATA GET NOT
YET
RL0C38
THICK
END/ERROR2
OT0238
THICK MEAS
START
CO00C6
H7 DATA SET COMP
0400 *0412 0412
0420 0422
0412
1-02
CI006C
S SCAN
DIRECTION
RL0C62
ENCODER
COUNT 3
RL0C63
ENCODER
COUNT 4
0412
1-03
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C66
ENCODER
COUNT 7
RL0C67
ENCODER
COUNT 8
0412
1-04
CI006C
S SCAN
DIRECTION
RL0C65
ENCODER
COUNT 6
RL0C66
ENCODER
COUNT 7
0412
1-05
CO00C6
H7 DATA SET
COMP
0413
1-01
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C68
ENCODER
COUNT 9
CO009D
MEAS START
ERR
RL0C36
DATA GET NOT
YET
RL0C38
THICK
END/ERROR2
OT0238
THICK MEAS
START
CO00C7
H8 DATA SET COMP
0400 *0413 0413
0421 0422
0413
1-02
CI006C
S SCAN
DIRECTION
RL0C61
ENCODER
COUNT 2
RL0C62
ENCODER
COUNT 3
0413
1-03
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C67
ENCODER
COUNT 8
RL0C68
ENCODER
COUNT 9
0413
1-04
CI006C
S SCAN
DIRECTION
RL0C64
ENCODER
COUNT 5
RL0C65
ENCODER
COUNT 6
0413
1-05
CO00C7
H8 DATA SET
COMP
0414
1-01
CI001F
S-AXIS
RL0C62
ENCODER
COUNT 3
CI006C
S SCAN
DIRECTION
OT0378
VACUUM
VALVE 1
CO00C0
H1 DATA SET
COMP
RL0C70
NOT VACUUM HEAD1
*0414 0422
0414
1-02
RL0C69
ENCODER
COUNT 10
CI006C
S SCAN
DIRECTION
0415
1-01
CI001F
S-AXIS
RL0C63
ENCODER
COUNT 4
CI006C
S SCAN
DIRECTION
OT0379
VACUUM
VALVE 2
CO00C1
H2 DATA SET
COMP
RL0C71
NOT VACUUM HEAD2
*0415 0422
0415
1-02
RL0C68
ENCODER
COUNT 9
CI006C
S SCAN
DIRECTION
0416
1-01
CI001F
S-AXIS
RL0C64
ENCODER
COUNT 5
CI006C
S SCAN
DIRECTION
OT037A
VACUUM
VALVE 3
CO00C2
H3 DATA SET
COMP
RL0C72
NOT VACUUM HEAD3
*0416 0422
0416
1-02
RL0C67
ENCODER
COUNT 8
CI006C
S SCAN
DIRECTION
0417
1-01
CI001F
S-AXIS
RL0C65
ENCODER
COUNT 6
CI006C
S SCAN
DIRECTION
OT037B
VACUUM
VALVE 4
CO00C3
H4 DATA SET
COMP
RL0C73
NOT VACUUM HEAD4
*0417 0422
0417
1-02
RL0C66
ENCODER
COUNT 7
CI006C
S SCAN
DIRECTION
Date
Page
Name
Title
Panasonic
PC System for Windows
Program
P8000CC
10/01/2007
72
BMV112A
V01.12A
＊＊ＬＡＤＤＥＲ ＤＩＡＧＲＡＭ＊＊
0418
1-01
CI001F
S-AXIS
RL0C66
ENCODER
COUNT 7
CI006C
S SCAN
DIRECTION
OT037C
VACUUM
VALVE 5
CO00C4
H5 DATA SET
COMP
RL0C74
NOT VACUUM HEAD5
*0418 0422
0418
1-02
RL0C65
ENCODER
COUNT 6
CI006C
S SCAN
DIRECTION
0419
1-01
CI001F
S-AXIS
RL0C67
ENCODER
COUNT 8
CI006C
S SCAN
DIRECTION
OT037D
VACUUM
VALVE 6
CO00C5
H6 DATA SET
COMP
RL0C75
NOT VACUUM HEAD6
*0419 0422
0419
1-02
RL0C64
ENCODER
COUNT 5
CI006C
S SCAN
DIRECTION
0420
1-01
CI001F
S-AXIS
RL0C68
ENCODER
COUNT 9
CI006C
S SCAN
DIRECTION
OT037E
VACUUM
VALVE 7
CO00C6
H7 DATA SET
COMP
RL0C76
NOT VACUUM HEAD7
*0420 0422
0420
1-02
RL0C63
ENCODER
COUNT 4
CI006C
S SCAN
DIRECTION
0421
1-01
***LM-V2***
CI001F
S-AXIS
RL0C69
ENCODER
COUNT 10
CI006C
S SCAN
DIRECTION
OT037F
VACUUM
VALVE 8
CO00C7
H8 DATA SET
COMP
RL0C77
NOT VACUUM HEAD8
*0421 0422
0421
1-02
RL0C62
ENCODER
COUNT 3
CI006C
S SCAN
DIRECTION