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Date Page Name Tit le Panasonic PC System for Windows Program P8000CC 10/01/2007 72 BMV112A V01.12A ＊＊ＬＡＤＤ ＥＲ ＤＩＡＧＲＡＭ＊ ＊ 0418 1-01 CI001F S-AXIS RL0C66 ENCO DER COUN T 7 CI00 6C S SCAN DIRECTION OT037C VACUUM VALVE 5 CO0…

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Date
Page
Name
Title
Panasonic
PC System for Windows
Program
P8000CC
10/01/2007
71
BMV112A
V01.12A
＊＊ＬＡＤＤＥＲ ＤＩＡＧＲＡＭ＊＊
0412
1-01
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C67
ENCODER
COUNT 8
RL0C68
ENCODER
COUNT 9
CO009D
MEAS START
ERR
RL0C36
DATA GET NOT
YET
RL0C38
THICK
END/ERROR2
OT0238
THICK MEAS
START
CO00C6
H7 DATA SET COMP
0400 *0412 0412
0420 0422
0412
1-02
CI006C
S SCAN
DIRECTION
RL0C62
ENCODER
COUNT 3
RL0C63
ENCODER
COUNT 4
0412
1-03
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C66
ENCODER
COUNT 7
RL0C67
ENCODER
COUNT 8
0412
1-04
CI006C
S SCAN
DIRECTION
RL0C65
ENCODER
COUNT 6
RL0C66
ENCODER
COUNT 7
0412
1-05
CO00C6
H7 DATA SET
COMP
0413
1-01
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C68
ENCODER
COUNT 9
CO009D
MEAS START
ERR
RL0C36
DATA GET NOT
YET
RL0C38
THICK
END/ERROR2
OT0238
THICK MEAS
START
CO00C7
H8 DATA SET COMP
0400 *0413 0413
0421 0422
0413
1-02
CI006C
S SCAN
DIRECTION
RL0C61
ENCODER
COUNT 2
RL0C62
ENCODER
COUNT 3
0413
1-03
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C67
ENCODER
COUNT 8
RL0C68
ENCODER
COUNT 9
0413
1-04
CI006C
S SCAN
DIRECTION
RL0C64
ENCODER
COUNT 5
RL0C65
ENCODER
COUNT 6
0413
1-05
CO00C7
H8 DATA SET
COMP
0414
1-01
CI001F
S-AXIS
RL0C62
ENCODER
COUNT 3
CI006C
S SCAN
DIRECTION
OT0378
VACUUM
VALVE 1
CO00C0
H1 DATA SET
COMP
RL0C70
NOT VACUUM HEAD1
*0414 0422
0414
1-02
RL0C69
ENCODER
COUNT 10
CI006C
S SCAN
DIRECTION
0415
1-01
CI001F
S-AXIS
RL0C63
ENCODER
COUNT 4
CI006C
S SCAN
DIRECTION
OT0379
VACUUM
VALVE 2
CO00C1
H2 DATA SET
COMP
RL0C71
NOT VACUUM HEAD2
*0415 0422
0415
1-02
RL0C68
ENCODER
COUNT 9
CI006C
S SCAN
DIRECTION
0416
1-01
CI001F
S-AXIS
RL0C64
ENCODER
COUNT 5
CI006C
S SCAN
DIRECTION
OT037A
VACUUM
VALVE 3
CO00C2
H3 DATA SET
COMP
RL0C72
NOT VACUUM HEAD3
*0416 0422
0416
1-02
RL0C67
ENCODER
COUNT 8
CI006C
S SCAN
DIRECTION
0417
1-01
CI001F
S-AXIS
RL0C65
ENCODER
COUNT 6
CI006C
S SCAN
DIRECTION
OT037B
VACUUM
VALVE 4
CO00C3
H4 DATA SET
COMP
RL0C73
NOT VACUUM HEAD4
*0417 0422
0417
1-02
RL0C66
ENCODER
COUNT 7
CI006C
S SCAN
DIRECTION
Date
Page
Name
Title
Panasonic
PC System for Windows
Program
P8000CC
10/01/2007
72
BMV112A
V01.12A
＊＊ＬＡＤＤＥＲ ＤＩＡＧＲＡＭ＊＊
0418
1-01
CI001F
S-AXIS
RL0C66
ENCODER
COUNT 7
CI006C
S SCAN
DIRECTION
OT037C
VACUUM
VALVE 5
CO00C4
H5 DATA SET
COMP
RL0C74
NOT VACUUM HEAD5
*0418 0422
0418
1-02
RL0C65
ENCODER
COUNT 6
CI006C
S SCAN
DIRECTION
0419
1-01
CI001F
S-AXIS
RL0C67
ENCODER
COUNT 8
CI006C
S SCAN
DIRECTION
OT037D
VACUUM
VALVE 6
CO00C5
H6 DATA SET
COMP
RL0C75
NOT VACUUM HEAD6
*0419 0422
0419
1-02
RL0C64
ENCODER
COUNT 5
CI006C
S SCAN
DIRECTION
0420
1-01
CI001F
S-AXIS
RL0C68
ENCODER
COUNT 9
CI006C
S SCAN
DIRECTION
OT037E
VACUUM
VALVE 7
CO00C6
H7 DATA SET
COMP
RL0C76
NOT VACUUM HEAD7
*0420 0422
0420
1-02
RL0C63
ENCODER
COUNT 4
CI006C
S SCAN
DIRECTION
0421
1-01
***LM-V2***
CI001F
S-AXIS
RL0C69
ENCODER
COUNT 10
CI006C
S SCAN
DIRECTION
OT037F
VACUUM
VALVE 8
CO00C7
H8 DATA SET
COMP
RL0C77
NOT VACUUM HEAD8
*0421 0422
0421
1-02
RL0C62
ENCODER
COUNT 3
CI006C
S SCAN
DIRECTION
Date
Page
Name
Title
Panasonic
PC System for Windows
Program
P8000CC
10/01/2007
73
BMV112A
V01.12A
＊＊ＬＡＤＤＥＲ ＤＩＡＧＲＡＭ＊＊
0422
1-01
CO00C0
H1 DATA SET
COMP
CI00D0
H1 DATA GET
COMP
CO00C1
H2 DATA SET
COMP
CI00D1
H2 DATA GET
COMP
CO00C2
H3 DATA SET
COMP
CI00D2
H3 DATA GET
COMP
CO00C3
H4 DATA SET
COMP
CI00D3
H4 DATA GET
COMP
CO00C4
H5 DATA SET
COMP
0422
1-02
RL0C70
NOT VACUUM
HEAD1
RL0C71
NOT VACUUM
HEAD2
RL0C72
NOT VACUUM
HEAD3
RL0C73
NOT VACUUM
HEAD4
RL0C74
NOT VACUUM
HEAD5
0422
1-03
OT0378
VACUUM
VALVE 1
OT0379
VACUUM
VALVE 2
OT037A
VACUUM
VALVE 3
OT037B
VACUUM
VALVE 4
OT037C
VACUUM
VALVE 5
0422
1-04
CI001F
S-AXIS
CI006C
S SCAN
DIRECTION
RL0C67
ENCODER
COUNT 8
IN00B0
H IL TIMING
0422
1-05
CI006C
S SCAN
DIRECTION
RL0C6B
ENCODER
COUNT 12
0422
1-06
CO00C8
MEASUREMENT
END
0422
2-01
CI00D4
H5 DATA GET
COMP
CO00C5
H6 DATA SET
COMP
CI00D5
H6 DATA GET
COMP
CO00C6
H7 DATA SET
COMP
CI00D6
H7 DATA GET
COMP
CO00C7
H8 DATA SET
COMP
CI00D7
H8 DATA GET
COMP
CI001F
S-AXIS
0422
2-02
RL0C75
NOT VACUUM
HEAD6
RL0C76
NOT VACUUM
HEAD7
RL0C77
NOT VACUUM
HEAD8
0422
2-03
OT037D
VACUUM
VALVE 6
OT037E
VACUUM
VALVE 7
OT037F
VACUUM
VALVE 8
0422
2-04
0422
2-05
0422
3-01
OT0238
THICK MEAS
START
RL0C38
THICK
END/ERROR2
CO00C8
MEASUREMENT END
0422 *0422
0423
1-01
IN01B0
THICK DATA
2^0
CO01E0
THICK DATA 2-0
*0423
0424
1-01
IN01B1
THICK DATA
2^1
CO01E1
THICK DATA 2-1
*0424
0425
1-01
IN01B2
THICK DATA
2^2
CO01E2
THICK DATA 2-2
*0425
0426
1-01
IN01B3
THICK DATA
2^3
CO01E3
THICK DATA 2-3
*0426
0427
1-01
IN01B4
THICK DATA
2^4
CO01E4
THICK DATA 2-4
*0427
0428
1-01
IN01B5
THICK DATA
2^5
CO01E5
THICK DATA 2-5
*0428