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1 1956C211013 PLATE 1

2 1956C211093 PLATE 1

3 1956C211401 BAR 1

4 1956C211411 PLATE 1

5 1956C211432 BRACKET 1

6 1956C211462 BLOCK 1

7 1956C211472 BRACKET 1

8 1956C211482 BRACKET 1

9 1956C211511 PLATE 1

10 1956C211540 PLATE 3

11 1956C211570 BLOCK 1

12 1956C261042 PLATE 1

13 1956C261051 BRACKET 1

14 1956C261100 BRACKET 6

15 1956C261110 BRACKET 2

16 1956C261152 DOG 1

17 1956C261161 DOG 1

20 1956C281010 BLOCK SSR25×W1UUE Block(DA) 2

21 KXF0A7AAA00 CYLINDER CDQ2A32-30D-A73 1

22 KXF09JTAA00 BRACKET YB-03 1

23 KXF09JUAA00 JOINT YU-03 1

24 KXF00ZBAA00 SPEED-CONTROLLER AS2201F-01-04S 1

25 KXF0A7BAA00 GUIDE SSR15XWY1UU+160L 1

26 KXF09JMAA00 CYLINDER CJ2B16-45 1

27 KXF09T2AA00 D-PIN MSTH10-35 2

28 KXF00RYAA00 HANDLE A-231-2 1

29 KXF09T3AA00 ROLLER UMBB8-30 1

30 KXF07C0AA00 D-PIN MSTH6-20 1

番号

ＭＯ機番

ユニット名称

ﾏｽｸｸﾘｰﾆﾝｸﾞﾕﾆｯﾄ:SP28P-DH

UNIT NAME

PART NUMBER

品番部品名型式数量ﾗﾝｸ備考

Mask cleaning unit:SP28P-DH

PART LIST

MODULE NUMBER

パーツリスト

1956C2M0000

10-C

UNIT NUMBER

ユニットＮｏ.

PART NAME TYPE Q'TY RANK REMARKS

− −95 08 0002−（）

31 KXF09WWAA00 PH-SENSOR PM2-LL10-C1 1 A

32 1956C281330 CABLE-BEAR 340.050-075-13-3050.12PZ 1

33 KXF07B2AA00 PH-SENSOR PM-T53-C1 2 A

34 KXF02UPAA00 SPEED-CONTROLLER AS1201F-M5-04S 2

35 KXF09W2AA00 BOLT Hexagon socket countersunk head bolt M8×25L 4

36 KXF0A7CAA00 SPACER ASB-560 2

37 KXF0277AA00 FLOATING-JOINT JA15-5-080 1

38 KXF0A75AA00 GRIP GRM8 1

40 KXF05MMAA00 WASHER SSWA13-3.0 1

41 KXF0A7EAA00 RUBBER-LEG C-30-RK-18 1

42 KXF04RJAA00 BOLT Hexagon socket head cap screw M4×50L 2

43 KXF0B63AA00 WASHER WSSB16-12-1 1

番号