SP22P Mechanical20091001.pdf - 第78页

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1 1939C211033 NOZZLE 1

2 1939C211052 PLATE 1

3 1939C211091 PLATE 1

4 1939C211281 PLATE 1

5 1939C211321 NOZZLE 1

6 1939C261041 BRACKET 1

7 1939C261051 PLATE 1

8 1939C261062 PLATE 1

9 1939C261240 COVER 1

10 1939C261230 PAN 1

11 1939C281190 LINEAR-WAY 1RSR12MXUUC1+70L-Ⅰ(DA) 2

12 KXF07Z6AA00 CYLINDER CDU32-30D-A93 1

13 KXF07Z7AA00 CYLINDER CU32-30D 1

14 KXF02DNAA00 JOINT KQU06-00 2

15 KXF01VHAA00 TUBE TU0425B(6m) 1

16 KXF00ZCAA00 SPEED-CONTROLLER AS2201F-01-06S 4

17 KXF07FLAA00 STOPPER-BOLT UST6-20 2

18 KXF04A9AA00 KNOB Round knob M4×5L 2

21 KXF04TNAA00 BOLT Hexagon socket head cap screw M6×70L 4

22 KXF05V7AA00 FLOATING-JOINT JA30-10-125 2

23 KXF07Z4AA00 NIPPLE NA-1/8 1

24 KXF09T4AA00 VALVE CV101-X 1

25 KXF098LAA00 PH-SENSOR PM2-LF10-C1 1 A

26 KXF07ZBAA00 PIN LPT8-20 4

27 KXF04N9AA00 BOLT Hexagon socket button head screw M5×12L 4

28 1939C261131 BRACKET 1

29 KXF01E2AA00 RUBBER-CUSHION C-30-CS-4 2

30 1939C281421 HINGE B-1001-1(DA) 1

番号

ＭＯ機番

ユニット名称

自動ﾏｽｸｸﾘ-ﾆﾝｸﾞ:SP22P-M

UNIT NAME

PART NUMBER

品番部品名型式数量ﾗﾝｸ備考

Automatic mask cleaning:SP22P-M

PART LIST

MODULE NUMBER

パーツリスト

1939C2M0000

7-B

UNIT NUMBER

ユニットＮｏ.

PART NAME TYPE Q'TY RANK REMARKS

− −54 05 0006−（）

31 1939C261221 BRACKET 1

32 KXF0520AA00 S-PIN Spring pin φ2×15L 2

36 KXF09LSAA00 OIL-SEAL BM 1215 A0 1

37 1939C211460 HOLDER 1

番号