YSH20_cwd_je.pdf - 第16页
Confidential & Proprietary P A G E I/O F2-2 I/O F2-1 FDR PWR F2 FDR PWR F1 J0054 J0053 J0105 J0103 CN37 CN38 I/O F1-2 I/O F1-1 J0110 See Page 7 See Page 2 SYSTEM CONTROL BOX REMOTE IF BOARD I/O B CN27 HA CN21 CN21 J0…
Confidential & Proprietary
PAGE
FRONT LCD (STANDARD)
FRONT OPERATION SWITCHES
A12
MOUSE
A10
KEYBOARD
J0254
FRONT OPERATION SWITCHES
FRONT LCD TOUCH PANEL(OPTION)
LCD 1
J0252 LCD1
LCD1
DC12V IN
VGA SERIAL
A12
MOUSE
A10
KEYBOARD
RS232C F
RS232C F
J0254
VGA F
LCD1
VGA
LCD 1
VGA F
VGA
KEY
MOUSE
CN18
See Page 4
I/O CONVEYOR -2-
CN18
See Page 4
I/O CONVEYOR -2-
EXT.PWR
VGA
KEY
MOUSE
SERIAL1
CONTROL BOX
See Page 2
EXT.PWR
CONTROL BOX
See Page 2
J0252 LCD1
DC12V IN
FRONT OPERATION SWITCHES
J0181
LCD 1LCD 2
FRONT & REAR LCD TOUCH PANEL (OPTION)
KB R
MS R
J0253
KB1
MS1
J0252
CRT2
KB2
MS2
RS2
EX
CRT1
KB1
MS1
RS1
RS PC CRT PC KB/MS PC
SWITCHER BOARD ASSY
REAR OPERATION SWITCHES
EX
KB2
MS2
RS2 RS1
KB F
MS F
KEY
CRT PC
CRT2 CRT1
CN18
See Page 4
I/O CONVEYOR -2-
EXT.PWR
KEY
VGA
SERIAL1
CONTROL BOX
See Page 2
J0182
See Page 4
I/O CONVEYOR -2-
CN20
CN24
I/O CONVEYOR -3-
See Page 5
MOUSE
A12
MS F
LCD 1
FRONT & REAR LCD(OPTION)
A11
KEYBOARD
A13
MOUSE
MS2
KB2 KEYBOARD
A10
KB F
MS1
KB1
LCD 2
KB R
MS R
EX
FRONT OPERATION SWITCHESREAR OPERATION SWITCHES
MS2
RS2
EX
CRT1
KB1
MS1
RS1
SWITCHER BOARD ASSY
CRT2
KB2
RS PC CRT PC KB/MS PC
KEY
CRT2 CRT1
J0182
See Page 4
CN20
I/O CONVEYOR -2-
CRT PC
P31
P31
J0252
J0181
CN18
See Page 4
I/O CONVEYOR -2-
VGA
KEY
I/O CONVEYOR -3-
See Page 5
CN24
EXT.PWR
LCD2
VGA
REAR SIDE
VGA R
DC12V IN
LCD1
VGA
FRONT SIDE
VGA F
DC12V IN
LCD1LCD2
REAR SIDE
KEYBOARD
A11
MOUSE
A13
LCD2
DC12V IN
SERIAL VGA
RS232C R
VGA R
LCD2
FRONT SIDE
A10
KEYBOARD
A12
MOUSE
LCD1
DC12V IN
VGA SERIAL
RS232C F
VGA F
LCD1
See Page 2
CONTROL BOX
J2005
J2007
E09
E09
J2005
J2007
J0181
J0181
J2031
J2004
J2006
J2003
RS232C F
J2031
J2003
J2004
J2006
J0242 J2033 J2034
J0253
J2021J2022
J0254J0255
J2031,J2032
J0193
J2003
J2016J2004
KEY
J0255 J0254
J2021J2022
J0243 J0242
E09
E09
J2016
KEY
J0193
RS PC
J2035J2033
J2003
J2004
J2031,J2032
CC.V3
13
OPERATION PANEL SEL.
YSH20
Confidential & Proprietary
PAGE
I/O F2-2
I/O F2-1
FDR PWR F2
FDR PWR F1
J0054
J0053
J0105
J0103
CN37
CN38
I/O F1-2
I/O F1-1
J0110
See Page 7
See Page 2
SYSTEM CONTROL BOX
REMOTE IF BOARD
I/O B
CN27 HA
CN21
CN21
J0730
J0729
J0728
J0727
J0726
J0725
J0724
J0723
J0722
J0721
J0710
J0709
J0708
J0707
J0706
J0705
J0704
J0703
J0702
J0701
CN17 F2
CN18 F2
CN17
CN18
CN21
CN21 CN1
CN2
CN3
CN4
CN5
CN6
CN7
CN8
CN9
CN10
CN11
CN1
CN2
CN3
CN4
CN5
CN6
CN7
CN8
CN9
CN10
CN11
COM
CUnet/SET POS.
+24V_IN
CN17
CN18
COM
CUnet/SET POS.
+24V_IN
CN17 F1
CN18 F1
CN16
.
.
.
CN20
CN19
FDR CTRL BOARD ASSY P103
FDR CTRL BOARD ASSY P104
CN16
.
.
.
CN20
CN19
J0711CN19
CN20
DO
DI
FDR DO0
FDR DI1
CN19
CN20
FDR DO0
FDR DI1
J0731
・10 SS feeders
・10 SS feeders
T0108200
N0108881
T0108280
N0108D01
FIX10 FRONT-2 FEEDER
FIX10 FRONT-1 FEEDER
J0700
J0108
J0720
J0109
J0104 NOTE1
NOTE1 : In the case of 4M HEAD, it connects with J0109
FCTR I/O HEAD BOARD A
See Page 8 : TYPE FF
See Page 10 : TYPE 4M
HEAD A
I/O CONVEYOR BOARD -5-
CC.V3
14
FEEDER STRUCTURE
YSH20
Confidential & Proprietary
PAGE
I PWR
CN34
CN5
J0793
ION B
J0791
ION A
LEFT SIDE
IONIZER A22
RIGHT SIDE
IONIZER A21
See Page 5
See Page 6
ION Y POW
See YWF
INTERCONNECTION DIAGRAM
J0792
J0794
WAFER TABLE
I/O CONVEYOR BOARD -3-
I/O CONVEYOR BOARD -4-
CC.V3
15
IONIZER ASSY(OPTION)
YSH20