YSH20_cwd_je.pdf - 第6页
Confidential & Proprietary P A G E F.OPE.PA NEL R.OPE.PA NEL GATE CN 25 CN18 CN20 I/O CONVEYOR BOARD ASSY P025 CN18 J0181 R.ERR.CLR R.RESET R.READY R.ACTIVE R.START R.STOP CN20 J0182 CN25 J0183 NEXT B NEXT A PREV A P…
Confidential & Proprietary
PAGE
EL04 COVER LIGHT
EL03 COVER LIGHT
EL02 COVER LIGHT
EL01 COVER LIGHT
LIGHT +24VBLIGHT +24VA
B-STAGE REAR
A-STAGE REAR
B-STAGE FRONT
A-STAGE FRONT
See Page 17
See Page 17
See Page 17
See Page 17
See Page 17
See Page 17
LED LIGHT
LIGHT BR
LIGHT AR
LIGHT BF
LIGHT AF
LIGHT
LIGHT
LIGHT
LIGHT
LED
LED
LED
LED
J0604J0603
J0602
COVER LIGHT ASSY (OPTION)
SYSTEM CONTROL BOX
COM
REMOTE IF BOARDI/O A
See Page 2
CN14
J0102CN14
POWER CIRCUIT -2-
See Page 18
QF45,XT43
XT43
QF45
J0601
+24VF4,+24VB6 CN45
CN45
J2061
TF SET SW
S10
1234 SRV ON
1222 T32
A1
I/O TF BOARDTFCN1
ELAVATION
A1
A2A1
INTERCONNECTION DIAGRAM
See YWF
J1708
84 TF+24E83 TF+24V
POWER CIRCUIT -1-POWER CIRCUIT -1-
QF41
J0173
J0033
HA PWR,HB PWR HEAD SERVO
+48B+48BJ0032
1233 +24C
KM12/KM12A
A2
2/T1
4/T2
6/T3
22
A1
1/L1
3/L2
5/L3
21
33 34
41 42
1221 T32B
A2 0V24
POWER CIRCUIT -1-POWER CIRCUIT -1-
POWER CIRCUIT -1-
QF42
QF31
POWER CIRCUIT -1-
J0041
C/V MOTOR DRIVER
J0041
NF11
J0005
W52
V52
U52
W51
V51
U51J0004
CONV+24E
1154+24C
1122 T32B
A2 0V24
CONV+24V
1153 +24B
1121 T32C
13
A1
53
73
83
21
63
1/L1
3/L2
5/L3
A2
14
2/T1
4/T2
6/T3
22
54
64
74
84
KM11/KM11A
24 +24E
14
34 +24B
13 +24V
23 +24V
33 +24V
A2 0V24
T11 EMG0
T12 EMG22
T22 EMG22
T31
T32
A1 +24V
KM10
CH2 CH1
K1K2
AC
DC
LOGIC
A1
A2
T11
T12
T22
T31
T32
13
23
3334
24
14
4142
J0172
WAFER TABLE
HEATERA61,A62
MGZN EMG DO
ELAVATION
HEAD I/O2 BOARD YWF
WAFER HEAD
LY ORG/OT
J1189
J0162
J0174
THRM EMG
YWF EMG
J0163
J0161
J0176
J0175
See YWF
INTERCONNECTION DIAGRAM
SYSTEM/SERVO CONTOROL BOX
INTERCONNECTION DIAGRAM
See YWF
INTERCONNECTION DIAGRAM
See YWF
HY CN18
J1163
REAR SIDE
REAR EMG SW
TF SET
COVER SW
SQ102
REAR
J1170
SB33
MGZN EMG
R1 EMG
MGZN EMG
R COVER
TF SET
EMG J0168
COVER J0169
FRONT SIDE
HB EMG
See Page2
C/R GOOD
CONTACTOR
EMG3
EMG1
EMG2
CN13
J0164CN13
HEAD B
HEAD A
CN48
CN12
CN11
I/O CONVEYOR BOARD ASSY P025
See Page 8
FRONT 2 EMG SW
FRONT 1 EMG SW
SB31
COVER SW
SQ101
FRONT
SB32
F COVER
F2 EMG
F1 EMG
CN11
EMG J0165
EMG J0166
COVER J0167
See Page 9
CN48
CN12
HA IO
HB IO
CC.V3
3
I/O CONVEYOR -1-
YSH20
Confidential & Proprietary
PAGE
F.OPE.PANEL
R.OPE.PANEL
GATE CN25
CN18
CN20
I/O CONVEYOR BOARD ASSY P025
CN18 J0181
R.ERR.CLR
R.RESET
R.READY
R.ACTIVE
R.START
R.STOP
CN20 J0182
CN25 J0183
NEXT B
NEXT A
PREV A
PREV B
F.RESET
F.READY
F.ERR.CLR
F.STOP
F.START
F.ACTIVE
ACTIVE
N0100395/T0100055
N0100394/T0100054
N0100393/T0100053
N0100392/T0100052
N0100391/T0100051
N0100390/T0100050
J0213
J0214
J0215
J0216
J0217
J0218
R.RESET(WHITE)
SB12
R.READY(WHITE)
SB11
SB10
R.START(GREEN)
R.ACTIVE(WHITE)
SB07
SB08
SB09
R.STOP(RED/WHITE)
R.ERROR CLEAR(YELLOW/BLUE)
R.OPERATION PANEL(OPTION)
N0100385/T0100045
N0100384/T0100044
N0100383/T0100043
N0100382/T0100042
N0100381/T0100041
N0100380/T0100040
J0212
J0211
J0210
J0209
J0208
J0207
F.ACTIVE(WHITE)
F.START(GREEN)
F.READY(WHITE)
F.RESET(WHITE)
SB01
SB02
SB03
SB04
SB05
SB06
F.STOP(RED/WHITE)
F.ERROR CLEAR(YELLOW/BLUE)
F.OPERATION PANEL
ACTIVE
START
START
STOP
STOP
ERR.CLR.
ERR.CLR.
READY
READY
RESET
RESET
DO13
DI19
FAN LOCK ALARM
FAN LOCK ALARM CN49
CN39
CN4
CN40
CN40 J0202
CN4 J0184
P1 FAN1
P1 FAN2
P2 AIR
P1 AIR
P
N01004B0 / N01004B1
P.BASE AIR PRESSURE(-)
SP12
P
P.YWF AIR PRESSURE(-)
N01004B3 / N01004B4
SP13
N01003B2
N01003B3
REAR PANEL
PUMP1 LEFT SIDE
CN39 J0048
SIDE PANEL(LEFT FRONT)
N01003B4
SIDE PANEL(RIGHT FRONT)
N01003B5
SIDE PANEL(RIGHT REAR)
SIDE PANEL(LEFT REAR)
N01003B6
N01003B7
FAN 1
FAN 2
FAN 3
FAN 4
CN49 J0047
FAN 5
FAN 6
FAN 7
FAN 8
N01004F0
N01004F1
N01004F2
N01004F3
YB(FRONT)
YA(FRONT)
YA(REAR)
YB(REAR)
FAN LOCK ALARM CN50
GATE CN51
+24VF5 CN27
CN27
J0051
See Page 2
EXT.PWR SERVO CONTROL BOX
DI12 CN7
CN7 J0201 AIR PRESS
P
N0100440
AIR PRESSURE(+)
SP11
P
AIR PRESSURE(+)AIR PRESS 2
SP14
N0100441
J0223
INTERFACE PANEL
INTERFACE PANEL
J0224
PREVIOUS INTERFACE
NEXT INTERFACE
BUSY IN:N0100420 / LR IN :N0100423
BA OUT :T01000E5 / UR OUT:T01000E6
COUNT RESET:N0100424
BUSY OUT:T01000E4 / LR OUT:T01000E7
BA IN :N0100421 / UR IN :N0100422
HL11
BUZZER
RUN(GREEN)
HL11
T01000D2
T01000D0
T01000D1
T01000D6
ALARM(RED/WHITE)
ERROR(YELLOW/BLUE)
J0199
J0198 NEXT
PREV
YWF PUMP
FAN1
FAN2
FAN3
FAN4
FAN5
FAN6
FAN7
FAN8
FAN P1
FAN P2
CC.V3
4
I/O CONVEYOR -2-
YSH20
Confidential & Proprietary
PAGE
T0100026
T0100022
T0100021
T0100025
PUSH UP A
PUSH UP B
PUSH UP A
PUSH UP B
BACK UP VACUUM A
BACK UP VACUUM B
MAIN STOPPER B HIGH END
I/O CONVEYOR -4-
DIP STATION B DIP STATION A
I/O CONVEYOR -4-
N01003D7
SQ043A
SQ043B
FRONT(R) FEEDER FLOAT
N01003D3
MAIN STOPPER A HIGH END
PUSH UP A LOWER
PUSH UP A HIGH END
N01003F2
N01003F0
W1-AXIS ORIGIN
DIP STATION B(OPTION)
N01003C7
SQ041A
SQ041B
FRONT(L) FEEDER FLOAT
N01003C3
N01003C1
N01003C0
PUSH UP B LOWER
PUSH UP B HIGH END
MAIN ST A
T0100020
T0100024
MAIN ST B
SUB ST
EXIT ST
T0100023
T0100027
CV1
SUB STOPPER UP
STAGE-B MAIN STOPPER UP
STAGE-A MAIN STOPPER UP
YV001
EXIT STOPPER UP
R.TERMINAL BOARD
F.TERMINAL BOARD
□60 MAX 300rpm
CONVEYOR MOTOR 1 30W
POWER CIRCUIT-1-
CN3
CN1
CN2C/V MOTOR 1
DI21,DO9
DO11
DO2,DO3
STAGE-B PCB MOUNT POSITION
STAGE-B WORK OUT
N01003D0
N01003D1
DIP STATION A(OPTION)
CONVEYOR EXIT
N01003F3
CN19
CN17
CN32
CN24
CN22
CN3
CN19
CN17
CN32
CN24
J0061
J0193
TCN1L
CN4
CN3
CN9
CN13
CN21
CN17
CN30
CN2
CN27
CN6
CN5
CN28
CN24
CN20
CN16
CN12
CN23
CN19
CN15
CN11
CN7
CN8
CN29
CN25
CN22
CN18
CN14
CN4
CN29
CN25
CN21
CN17
TCN21
TCN17
CN13
CN3
CN9
CN30
CN26
TCN21
CN2
CN27
CN6
CN5
CN28
CN24
CN20
CN16
CN12
CN23
CN19
CN15
CN11
CN7
CN8
CN22
CN18
CN14
TCN14
TCN10
TCN17
TCN8
TCN15
TCN15
CN10CN10
STAGE-A WORK OUT
STAGE-A PCB MOUNT POSITION
N0100406
N0100404
CONVEYOR EXIT
PCB DIRECTION L->R
TCN10
TCN14
TCN8
TCN8
I/O CONVEYOR BOARD ASSY P025
J0192
LEFT side RIGHT side
J0191
TCN1R
CONVEYOR DRIVER 1
P011
CN1
CN1
CV1 CN2
DCN1J0041
KM11A,XT42
CV1 CN3 J0062
BAC VAC A
BAC VAC B
ACTIVE CHANGE(T0100033)
OPERATION PANEL SEL.
EX
See Page 6 See Page 6
CN2DI20,DO8
CN23DO12
C/V MOTOR 2 CN33
DI11 CN5
CN5 J0791
IONIZER ASSY(OPTION)
IONIZER A,B
CN26
TCN26 L TCN26 R
BACK UP VACUUM SENSOR B1
N01003C4
BACK UP VACUUM(OPTION)
N01003D4
BACK UP VACUUM SENSOR A1
J0186 BAC VAC B J0185 BAC VAC A
CN46C/V MOTOR 3
CN47BRAKE
CN41AMF
SQ010
SQ011
SQ012
BACK UP VACUUM(OPTION)
SQ018
SQ019
TCN22 RTCN22 L
SQ020
F2 FEEDER FLOAT SENSOR(OPTION)F1 FEEDER FLOAT SENSOR(OPTION)
TCN3 R
TCN13 R
TCN3 L
TCN13 L
J0753J0754
SQ021
SQ024
SQ024
TCN7 RTCN7 L
SQ022
N01003F1/T01000E0
N0100406
N0100404
STAGE-A PCB MOUNT POSITION
CONVEYOR ENTRANCE
SUB POSITION
SUB STOPPER HIGH END
N0100410
STAGE-A WORK OUT
N0100411
N0100405/T01000E2
SQ013
SQ014
SQ015
SQ016
SQ017
N01003F2
STAGE-B PCB MOUNT POSITION
N01003F5
SUB STOPPER HIGH END
N01003F4
SUB POSITION
PCB DIRECTION L->R
STAGE-B WORK OUT
CONVEYOR ENTRANCE
N01003F3
N01003F1/T01000E0
SQ013
TCN11 R
TCN23 R
SQ023
TCN11 L
TCN23 L
SQ014
TCN7 L
TCN7 R
N0100405/T01000E2
SQ017
TCN11 L
TCN11 R
SQ015
SQ023
SQ016
SQ022
TCN19 L
TCN19 R
YV002
YV003
YV004
YV005
YV006
YV007
YV008
BACK UP VACUUM(OPTION)
SQ025SQ026
CN41 J0194 AMF1
T0100034
AMF2
T0100035
M18
TERMINAL BOARD ASSY P013TERMINAL BOARD ASSY P014
See Page 17
See Page 15
See Page 13
CONVEYOR
J0083
CC.V3
5
I/O CONVEYOR -3-
YSH20