YSH20_cwd_je.pdf - 第18页

Confidential & Proprietary

PAGE

I PWR

CN34

CN5

J0793

ION B

J0791

ION A

LEFT SIDE

IONIZER A22

RIGHT SIDE

IONIZER A21

See Page 5

See Page 6

ION Y POW

See YWF

INTERCONNECTION DIAGRAM

J0792

J0794

WAFER TABLE

I/O CONVEYOR BOARD -3-

I/O CONVEYOR BOARD -4-

CC.V3

15

IONIZER ASSY(OPTION)

YSH20

Confidential & Proprietary

PAGE

200V 208V 220V 240V 380V 400V 416V

V10

U10

V10

U10

V10

U10

V10

U10

V10

U10

V10

U10

V10

U10

R2

S2

T2

S3

R3 R3 R3 R3 R3 R3 R3

W50

V50

U50

W50

V50

U50

W50

V50

U50

W50

V50

U50

W50

V50

U50

W50 W50

V50

U50

V50

U50

W30

V30

U30

W30

V30

U30

W30

V30

U30

W30

V30

U30

W30

V30

U30

W30

V30

U30

W30

V30

U30

TC11:The selection of POWER SOURCE 1.5KVA(STD)/1.75KVA(with UPS)

TM11:The selection of POWER SOURCE 3.552KVA

100V

0V

100V

0V

100V

0V

100V

0V

100V

0V

100V

0V

240V

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

0V

100V

240V

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

0V

100V

240V

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

0V

100V

240V

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

0V

100V

240V

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

0V

100V

240V

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

0V

100V

240V

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

0V

100V

N N N NN N N

100V

0V

220V

220V 200V

200V

200V200V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

W

V

U

220V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

W

V

U

220V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

W

V

U

220V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

W

V

U

220V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

W

V

U

220V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

W

V

U

220V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

240V

220V

208V

200V

190V

0V

W

V

U

220V

CC.V3

16

POWER TRANSFORMER

YSH20

Confidential & Proprietary

PAGE

J0049

J0050

+24A

0V24A

J0043

0V24B

+24B

+24A

0V24A

+24A

1

2

DCN1

CONV+24V

QF41 5A

+48B +48B

+48B

HA +24V

HB +24V

+48B

0V48

+48A

J0032

+48A

T1

S1

R1

+24A

J0044

J0029

U11C

FG

V10

J0028

U11A

V10

FG

1

2

3

J0027

U10

V10

J0021

J0020

J0017

J0018

J0019

J0011

J0012

J0013

J0014

J0015

J0016

U30

V30

W30

1

2

3

V51

U51

V51

W51

FG

W50

V50

U50

W50

U50

V50

T2S2

R2

S2

T2T1

S1

J0001

R1

J0001

L3

L2

L1

QF44 4A(45℃ 3.5Amax)

QF42 2A(45℃ 1.75Amax)

+24A

MAX690V/40A

TC11

BUZZER

1

2 DRIVER

CONVEYOR

P011

ACIN

AC100V:CONTROL

EXT.PWR

See Page2

B10

・

B8

A8

B7

A7

B6

A6

・

B2

A2

B1

A1

BRACKET MAIN SWITCH

L1

L2

L3

PE

L1

L2

L3

T1

T2

T3

600W

-

+

-

+

N

L

FG

4/T2

5/L3

3/L2

1/L1 2/T1

6/T3

1.5KVA

0V

100V

240V

0V

190V

200V

208V

220V

0V

100V

240V

0V

190V

200V

208V

220V

+

FG

N

L

-

+

FG

N

L +

-

200V

N

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

240V

0V

190V

200V

208V

220V

240V

U

V

W

XB11

QS11

TM11

QF31 10A

GS31

GS21

GS22

L1

L2

L3

J0051

J0080

J0079

J0077

J0076

J0072

J0073

J0074

0V24A

QF43 4A(45℃ 3.5Amax)

T1

T2

T3

L1

L2

L3

CN1

POWER CIRCUIT -2-

12.5A

300W 12.5A

≧AWG10

(5.3sq)

MAX750V/44A

J0071

MAX690V/20A

QF11

220V

See Page 14

J0004J0003

AC220V

AC220V:DRIVE

MOTOR

POWER

E01 E02

NOTE:Icu≧7.5kA(AC440V)

J0002

E03

J0006

E05 E06

J0009

MAX690V/15A

NOTE:Icu≧6kA(AC440V)

R1

S1

R3

S3

J0010

See Page 14

J0022

AC100V

XT41

MAX600V/30A

XT42

MAX600V/30A

0V24A

0V24A 0V24A

0V24A

SERVO CONTROL BOX A2

J0032

+48C

J0033

J0041

J0042

1

22

1

BUZZERJ0119

J0046

LCD2

LCD1

CN27

POWER CIRCUIT -2-

J0051

FRONT

REAR

J2031

J2032

1

2

1

2

1

2

1

2

LCD1

LCD2

J0252

J0253

TOUCH PANEL MONITOR(OPTION)

HB PWR

HA PWR

6

5

4

1

2

3

6

5

4

1

2

3

1

2

3

4

5

6

1

2

3

4

5

6

J0503

J0513

6

5

4

1

2

3

1

2

3

4

5

6

H PWR

6

5

4

1

2

3

1

2

3

4

5

6

H PWR

J0504

6

5

4

1

2

3

1

2

3

4

5

6

H PWR

J0310

1

2

3

4

3

2

1

4

+48V

+24V

GND+24V

GND+48V

6

5

4

1

2

3

1

2

3

4

5

6

H PWR

1

2

3

4

3

2

1

4

+48V

+24V

GND+24V

GND+48V

J0330J0514

CN1

CN1 CN1

CN1

P052

P042

*

Residual risk

when MAIN SW QS11 is OFF.

！

High Voltage

QF12

S3

600W 27A

See YWF

INTERCONNECTION DIAGRAM

Peak 41.5A 5sec

I/O CONVEYOR BOARD

HA01

HEAD I/O2 BOARD ASSY A

HEAD I/O2 BOARD ASSY B

QF53,TFCN2

J0040

J0056 QF54,HY+24V

YWF I/O HEAD BOARD

I/O TF BOARD

J0037

J0035

QF51,HY+48V

YWF POWER CIRCUIT

0V48

MAX600V/15A

XT31

0V48

W53

V53

U53

W52

V52

U52

J0075

NF11

MAX500V/20A

E E

1

2

3

4

5

6

J0041

CONV+24V CONV+24E

U52

V52

W52W51

V51

U51

6/T35/L3

3/L2

2/T11/L1

4/T2

MAX660V/13A

73 74

KM11

KM11A

J0005

E04

MAX690V/6A

KM12

V10

U11A

V10

J0025

J0023

V10

U10

QF21 10A

V10

XT21

MAX600V/30A

U11C

QF22 5A

U11C

V10

＊The charge mark is put on the place

that might be gotten an electric shock.

・Secondary side of UPS.

・Chemical capacity for motor power in

・On the cover at the front right side.

・Near the MAIN SW QS11.

・Between INCOMING SUPPLY TERMINAL BLOCKS XB11

and MAIN SW QS11.

・Lower of INCOMING SUPPLY TERMINAL BLOCKS XB11.

・Around J0001 harness.

SERVO CONTROL BOX A2.

W31

V31

U31

J0008

W31

V31

U31U30

V30

W30

J0007

M19

E

VACUUM PUMP

QF32 Set 1.3A

(1.0-1.6A)

0.2kW

3.552KVA

See Page 18

MAX600V/15A

0V24VAF

LIGHT +24VA 41 42 LIGHT +24VBLIGHT +24VA

QF45 1A

XT43

KM12A

See Page 18

POWER CIRCUIT -2-

I/O CONVEYOR BOARD CN45

I/O CONVEYOR BOARD

See Page 18

POWER CIRCUIT -2-

LED LIGHT

J0601 J0603

J0602

EMERGENCY CIRCUIT(WITH YWF):See Page 20

EMERGENCY CIRCUIT(NO YWF) :See Page 19

+24VF4

0V24VF4 0V24VF4

・On the cover at the rear left side.

・On the cover at the rear right side.

・On the cover at the front left side.

・On the rear side of the right side panel.

・On the rear side of the left side panel.

・On the front cover at SERVO CONTROL BOX A2.

・On the front cover at HEATER RELAY PANEL .

J0078

YWF POWER CIRCUIT

See YWF

INTERCONNECTION DIAGRAM

J2071

HEATER PWR

U11C

V10C

U10

V10

100V

0V

240V

0V

190V

200V

208V

220V

0V

100V

1.75kVA

QF61 15A

V10A

U10A

240V

0V

190V

200V

208V

220V

U10

V10

At the UPS specification

UPS IN

UPS OUT

GB1

SIGNAL

UPS

J0010

J0076

J0077

J0020

J0021

V10

U10

V10

U10

J0022

J0029

XT21

V10

QF21

U10

UPS OUT

UPS

UPS IN

J0781

J0782

J0783

See Page 2

EXT.POWER

U11C

V10C

GS22 N

GS22 L

TC11

See Page 14

S3

R3

J0023

J0025

QF62 5A

SERVO CONTROL BOX

Note : QF22 is not used at the UPS specification.

CC.V3

17

POWER CIRCUIT -1-

YSH20