YSH20_cwd_je.pdf - 第5页
Confidential & Proprietary P A G E EL04 COVER LIGH T EL03 COVER LIGH T EL02 COVER LIGH T EL01 COVER LIGH T LIGHT +24VB LIGHT +24VA B-STAGE REAR A-STAGE REAR B-STAGE FRONT A-STAGE FRONT See Page 17 See Page 17 See Pag…
Confidential & Proprietary
PAGE
HEAD A
SERVO C/R BOX ASSY A2
PWR SRV CR
RAS SRV CR
□42 MAX 500rpm
AC100V
CAM1(HALF)
CAM2(FULL)
CAM3(HALF)
CAM4(FULL)
TRG1
TRG2
SRVA
SRVB
BRAKE
BRAKE
(LY,LCX,LCY1,LCY2) MO
(LY,LCX,LCY1,LCY2) ENC
(LZ,LX,LE,LA) MO
SERVO BOARD ASSY 1(OPTION)
GOOD
TRG1
TRG2
SRV CMN
GOOD
TRG1
AC100V
(W) M3
(XA,XB,LFX,-) MO
(XA,XB,LFX,-) ENC
GOOD
TRG1
TRG2
SRV CMN
SERVO BOARD ASSY 4
SERVO BOARD ASSY 3
SRV CMN
TRG2
TRG1
GOOD
(YA,YB,LH,W) ENC
BRAKE
(YA) M0
(LH) M2
(YB) M1
BRAKE
SRVA
TRG2
TRG1
CAM4(FULL)
CAM3(HALF)
CAM2(FULL)
CAM1(HALF)
LAN
USB2
USB1
MOUSE
LHP
LHM
LFXP
LFXM
LYM,LCXM,LCY1M,LCY2M
LYP,LCXP,LCY1P,LCY2P
(LZ,LX,LA) ENC
LEPSERIAL I/F BOARD
SRVB
I/O
CN11
(LE) ENC3
SYSTEM
VISION 2 (OPTION)
VISION 1
INTERFACE 1
INTERFACE 2 (OPTION)
I/O
SYSTEM C/R BOX ASSY A1
J0120USB4
USB3
USB4 USB MEMORY
USB4
CAMERA UNIT SEL.
J0521
V1 CAM1
V1 CAM2
V1 CAM3
J0501
J0502
V2 CAM4
J0512V2 CAM2
J1501
J0511
J0522
V2 CAM1
V2 CAM3
V2 TRG1
J0551V1 TRG 1
S3 TRG2
S3 TRG1
EMG
EMG
HA SRV XYP
J0402I/F1 SRVB
SRV3 CMN
SRV4 CMN
J0401I/F1 SRVA
SRV2 CMN
SRV1 CMN
J1402I/F2 SRVB
I/F2 SRVA J1401
SRV CMN
TRG2
J0163IF1 GOOD
SRV1 GOOD
SRV2 GOOD
SRV4 GOOD
SRV3 GOOD
IF2 GOOD
IF1 I/O
I/O A I/O AI/O A
J0101
FDR CTRL BOARD
I/O F1-1
J0102
I/O B
CN14
J0103
See YWF
INTERCONNECTION DIAGRAM
J0107
I/O CI/O C
CN27
KGK HEAD I/O B
PAS SRV CRRAS SYS CR J0411
J0410 PWR SRV CRPWR SYS CR
PWR SYS CR
RAS SYS CR
XYAM
HB SRV XYP
HEAD B
XYBM
SERVO3 MO
SRV4 M1
J0141
SERVO UNIT ASSY 2(OPTION)
SRV4 M0
XBP
XAP
J0121PI3
M3
WM
M2 J0142
YAP
YBP
J0122PI4
WP W1P W1PJ0133 WP
W-AXIS 100W
J0027
AC100V
AC220V
ACIN
AC220V J0006
POWER CIRCUIT-1-
YWF (OPTION)
See YWF
INTERCONNECTION DIAGRAM
LHP
J1134
SERVO1 MO J1141
PI1 J1123
LZM,LXM,LAEM
SERVO2 MO J1143
ENC3 J1137
PI2 J1127
J1451SRV2 BRAKE
LZP,LXP,LAP
LZB
CALIB A,B (OPTION)
M05
J0178
J0179
J0177
J0113
J0115
CN1
CN1,I/O ANC ANC A,B (OPTION)
I/O CONVEYOR BOARD
CN23,CN24
I/O TF BOARD
See Page 3
See Page 7
See Page 9
CAMERA UNIT SEL.
J0106
CN2
INTERCONNECTION DIAGRAM
See YWF
WAFER HEAD
J0111 NOTE1
NOTE1 : In the case of 4M HEAD, it connects with J0106
See Page 12
See Page 14
See Page 12
See Page 10:TYPE 4M
See Page 8 :TYPE FF
See Page 9 :TYPE FF
See Page 11:TYPE 4M
See Page 17
KEY
SERIAL2
SERIAL1
VGA
SERIAL1
KEY
OPERATION PANEL SEL.
VGA
See Page 13
PCS/M
CABLE HOST(OPTION)
S/M
PE J0082
CN27
EXT POWER
J0051EXT.PWR
AIR REGULATOR PANEL
BUZZER
J0119
I/O CONVEYOR BOARD
HA01
WIN BUZZER
UPS
J2031,J2032
J0783
See Page 4
POWER CIRCUIT-1-
OPERATION PANEL SEL.
See Page 17
See Page 13
PE J0081
LCD PWR
DC12V
CC.V3
2
CONTROL BOX
YSH20
Confidential & Proprietary
PAGE
EL04 COVER LIGHT
EL03 COVER LIGHT
EL02 COVER LIGHT
EL01 COVER LIGHT
LIGHT +24VBLIGHT +24VA
B-STAGE REAR
A-STAGE REAR
B-STAGE FRONT
A-STAGE FRONT
See Page 17
See Page 17
See Page 17
See Page 17
See Page 17
See Page 17
LED LIGHT
LIGHT BR
LIGHT AR
LIGHT BF
LIGHT AF
LIGHT
LIGHT
LIGHT
LIGHT
LED
LED
LED
LED
J0604J0603
J0602
COVER LIGHT ASSY (OPTION)
SYSTEM CONTROL BOX
COM
REMOTE IF BOARDI/O A
See Page 2
CN14
J0102CN14
POWER CIRCUIT -2-
See Page 18
QF45,XT43
XT43
QF45
J0601
+24VF4,+24VB6 CN45
CN45
J2061
TF SET SW
S10
1234 SRV ON
1222 T32
A1
I/O TF BOARDTFCN1
ELAVATION
A1
A2A1
INTERCONNECTION DIAGRAM
See YWF
J1708
84 TF+24E83 TF+24V
POWER CIRCUIT -1-POWER CIRCUIT -1-
QF41
J0173
J0033
HA PWR,HB PWR HEAD SERVO
+48B+48BJ0032
1233 +24C
KM12/KM12A
A2
2/T1
4/T2
6/T3
22
A1
1/L1
3/L2
5/L3
21
33 34
41 42
1221 T32B
A2 0V24
POWER CIRCUIT -1-POWER CIRCUIT -1-
POWER CIRCUIT -1-
QF42
QF31
POWER CIRCUIT -1-
J0041
C/V MOTOR DRIVER
J0041
NF11
J0005
W52
V52
U52
W51
V51
U51J0004
CONV+24E
1154+24C
1122 T32B
A2 0V24
CONV+24V
1153 +24B
1121 T32C
13
A1
53
73
83
21
63
1/L1
3/L2
5/L3
A2
14
2/T1
4/T2
6/T3
22
54
64
74
84
KM11/KM11A
24 +24E
14
34 +24B
13 +24V
23 +24V
33 +24V
A2 0V24
T11 EMG0
T12 EMG22
T22 EMG22
T31
T32
A1 +24V
KM10
CH2 CH1
K1K2
AC
DC
LOGIC
A1
A2
T11
T12
T22
T31
T32
13
23
3334
24
14
4142
J0172
WAFER TABLE
HEATERA61,A62
MGZN EMG DO
ELAVATION
HEAD I/O2 BOARD YWF
WAFER HEAD
LY ORG/OT
J1189
J0162
J0174
THRM EMG
YWF EMG
J0163
J0161
J0176
J0175
See YWF
INTERCONNECTION DIAGRAM
SYSTEM/SERVO CONTOROL BOX
INTERCONNECTION DIAGRAM
See YWF
INTERCONNECTION DIAGRAM
See YWF
HY CN18
J1163
REAR SIDE
REAR EMG SW
TF SET
COVER SW
SQ102
REAR
J1170
SB33
MGZN EMG
R1 EMG
MGZN EMG
R COVER
TF SET
EMG J0168
COVER J0169
FRONT SIDE
HB EMG
See Page2
C/R GOOD
CONTACTOR
EMG3
EMG1
EMG2
CN13
J0164CN13
HEAD B
HEAD A
CN48
CN12
CN11
I/O CONVEYOR BOARD ASSY P025
See Page 8
FRONT 2 EMG SW
FRONT 1 EMG SW
SB31
COVER SW
SQ101
FRONT
SB32
F COVER
F2 EMG
F1 EMG
CN11
EMG J0165
EMG J0166
COVER J0167
See Page 9
CN48
CN12
HA IO
HB IO
CC.V3
3
I/O CONVEYOR -1-
YSH20
Confidential & Proprietary
PAGE
F.OPE.PANEL
R.OPE.PANEL
GATE CN25
CN18
CN20
I/O CONVEYOR BOARD ASSY P025
CN18 J0181
R.ERR.CLR
R.RESET
R.READY
R.ACTIVE
R.START
R.STOP
CN20 J0182
CN25 J0183
NEXT B
NEXT A
PREV A
PREV B
F.RESET
F.READY
F.ERR.CLR
F.STOP
F.START
F.ACTIVE
ACTIVE
N0100395/T0100055
N0100394/T0100054
N0100393/T0100053
N0100392/T0100052
N0100391/T0100051
N0100390/T0100050
J0213
J0214
J0215
J0216
J0217
J0218
R.RESET(WHITE)
SB12
R.READY(WHITE)
SB11
SB10
R.START(GREEN)
R.ACTIVE(WHITE)
SB07
SB08
SB09
R.STOP(RED/WHITE)
R.ERROR CLEAR(YELLOW/BLUE)
R.OPERATION PANEL(OPTION)
N0100385/T0100045
N0100384/T0100044
N0100383/T0100043
N0100382/T0100042
N0100381/T0100041
N0100380/T0100040
J0212
J0211
J0210
J0209
J0208
J0207
F.ACTIVE(WHITE)
F.START(GREEN)
F.READY(WHITE)
F.RESET(WHITE)
SB01
SB02
SB03
SB04
SB05
SB06
F.STOP(RED/WHITE)
F.ERROR CLEAR(YELLOW/BLUE)
F.OPERATION PANEL
ACTIVE
START
START
STOP
STOP
ERR.CLR.
ERR.CLR.
READY
READY
RESET
RESET
DO13
DI19
FAN LOCK ALARM
FAN LOCK ALARM CN49
CN39
CN4
CN40
CN40 J0202
CN4 J0184
P1 FAN1
P1 FAN2
P2 AIR
P1 AIR
P
N01004B0 / N01004B1
P.BASE AIR PRESSURE(-)
SP12
P
P.YWF AIR PRESSURE(-)
N01004B3 / N01004B4
SP13
N01003B2
N01003B3
REAR PANEL
PUMP1 LEFT SIDE
CN39 J0048
SIDE PANEL(LEFT FRONT)
N01003B4
SIDE PANEL(RIGHT FRONT)
N01003B5
SIDE PANEL(RIGHT REAR)
SIDE PANEL(LEFT REAR)
N01003B6
N01003B7
FAN 1
FAN 2
FAN 3
FAN 4
CN49 J0047
FAN 5
FAN 6
FAN 7
FAN 8
N01004F0
N01004F1
N01004F2
N01004F3
YB(FRONT)
YA(FRONT)
YA(REAR)
YB(REAR)
FAN LOCK ALARM CN50
GATE CN51
+24VF5 CN27
CN27
J0051
See Page 2
EXT.PWR SERVO CONTROL BOX
DI12 CN7
CN7 J0201 AIR PRESS
P
N0100440
AIR PRESSURE(+)
SP11
P
AIR PRESSURE(+)AIR PRESS 2
SP14
N0100441
J0223
INTERFACE PANEL
INTERFACE PANEL
J0224
PREVIOUS INTERFACE
NEXT INTERFACE
BUSY IN:N0100420 / LR IN :N0100423
BA OUT :T01000E5 / UR OUT:T01000E6
COUNT RESET:N0100424
BUSY OUT:T01000E4 / LR OUT:T01000E7
BA IN :N0100421 / UR IN :N0100422
HL11
BUZZER
RUN(GREEN)
HL11
T01000D2
T01000D0
T01000D1
T01000D6
ALARM(RED/WHITE)
ERROR(YELLOW/BLUE)
J0199
J0198 NEXT
PREV
YWF PUMP
FAN1
FAN2
FAN3
FAN4
FAN5
FAN6
FAN7
FAN8
FAN P1
FAN P2
CC.V3
4
I/O CONVEYOR -2-
YSH20