DECAN_S1_Maintenance(Eng_Ver1.1)_Print.pdf - 第45页
DE CAN S1 M ain ten anc e Ha nd boo k 3-1 4 chapt er 3 Daily Inspe ction Nex t Generation, Multi- Functi onal Placer Checking and Cleaning Fix Camera Cover Glass Daily Inspection Checking and Cleaning Fix Camera Cover Gl…
DECAN S1 Maintenance Handbook
3-13
chapter 3
Daily Inspection
Next Generation, Multi-Functional Placer
Checking and replacing Mist Separator Filter
Step 5.
Separate the container by turning it counterclockwise
Step 6.
Turn the filter clockwise to separate it.
Dispose of contaminated filters removed from the equipment
immediately as they cannot be reused and improper use may cause
problems with product performance.
Step 7.
Release the emergency stop as described in "Releasing
'Emergency Stop' mode" on page 1-6 and perform the
operation again.
DECAN S1 Maintenance Handbook
3-14
chapter 3
Daily Inspection
Next Generation, Multi-Functional Placer
Checking and Cleaning Fix Camera Cover Glass
Daily Inspection
Checking and Cleaning Fix Camera Cover Glass
Remove foreign material on the glass to prevent part recognition error.
Tool for Maintenance
Ultra fine fiber cloth, alcohol, Wrench
Measures
Step 1.
Move the X-frame to the rear.
For more details, refer to "Backward movement of the X-frame" on
page 1-4
Step 2.
Press the 'STOP' and 'RESET' buttons in order after
pressing the 'EMG' button on the OP panel to stop
operation.
For more details, refer to "How to perform emergency stop" on page
1-2.
Step 3.
Separate Screw by using Srew Driver.
(Time required: 10min / No. D-6)
DECAN S1 Maintenance Handbook
3-15
chapter 3
Daily Inspection
Next Generation, Multi-Functional Placer
Checking and Cleaning Fix Camera Cover Glass
Step 4.
Remove the backup pin
①Moisten the clean cloth with alcohol
②Clean the cover glass