三星 SM421 校正.pdf - 第339页
Machine Calibration 14.3.7.7. Fly Camera Offset Calibration Head Spindle Calibration’ ‘Fly-Camera Scale Calibration’ ‘Head Z-Offset Calibration’, 1. < > ANC1 …
Samsung Component Placer SM421 Administrator’s Guide
FOV 16 (MEGA)
ScaleX: 15.39~16.35 (m/pixel)
ScaleY: 15.39~16.35 (m/pixel)
OV 25 (ME A) F G
ScaleX:23.56~24.52 (m/pixel)
ScaleY: 23.56~24.52 (m/pixel)
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Machine Calibration
14.3.7.7. Fly Camera Offset Calibration
Head Spindle
Calibration’‘Fly-Camera Scale Calibration’ ‘Head Z-Offset Calibration’,
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<11. Fly Camera Offset> Gantry
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2. <11. Fly Camera Offset>“
Z []”
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‘Fly-Camera Offset
CNT20
Fly-Camera Offset
3. Z
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6. Align Mirror
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, Head Assembly
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CNT20
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Samsung Component Placer SM421 Administrator’s Guide
7. <>
Calibration Calibration
8. “, 校 H1 , [] ,
用手 CNT20
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1 Head 2~6
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