三星 SM421 校正.pdf - 第381页
Diagnosis 16-5 16.3. Light [F4] , 16-5. “ : ” < > < > �…

Diagnosis
16-5
16.3. Light [F4]
,
16-5. “
:
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12
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Samsung Component Placer SM421 Administrator’ Guide
16-6
16.4. Vacuum [F5]
16-6. “
:
”
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<Gantry>
Gantry
<>
Head
< OFF>
“OFF”Spindle
ON
ON Spindle
OFF
< OFF>
“OFF”Spindle 0.1Mpa
ON
ONSpindleOFF
<>
Vacuum Check
<>
