三星 SM421 校正.pdf - 第382页
Samsung Component Placer SM421 Administrator ’ Guide 16-6 16.4. V acuum [F5] 16-6. “ : ” < > <Gantr…
Diagnosis
16-5
16.3. Light [F4]
,
16-5. “
:
”
<>
<>
<>
<>
12
<>
015
<>Side015
<>: Outer015
<>
Samsung Component Placer SM421 Administrator’ Guide
16-6
16.4. Vacuum [F5]
16-6. “
:
”
<>
<Gantry>
Gantry
<>
Head
< OFF>
“OFF”Spindle
ON
ON Spindle
OFF
< OFF>
“OFF”Spindle 0.1Mpa
ON
ONSpindleOFF
<>
Vacuum Check
<>
Diagnosis
16-7
’C:\SmartSM\Temp’ Va c u u m C h e ck
< >
Head
<>
Head
<>
Head
<>
<>
<>
<>
Gantry Head
<>