SP18 机械Parts List.pdf - 第146页
8 雰囲気 温 調 チャンバー Atmospheric Temperat ure Control Chamber パーツレイアウト Kit No. キット品 番 Kit Name キット名称 N610012862AA ｾｸｼｮﾝNo. PARTS LAYOUT Section No. S17
Ref
No.
Remarks
R
1
Q't
y
7
Mサイズ
枠
対応
分
割ク
ラ
ンパー (L)
M-size Mask Capable Separate Clamper(L)
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit No.
キット品
番
Kit Name
キット名称
N610012857AA
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
CLAMPER
1
1 N210043440AC
CLAMPER
1
2 N210043441AC
PLATE
1
3 N210043442AB
PLATE
1
4 N210043443AB
PLATE
1
5 N210043444AB
PLATE
1
6 N210043445AB
PLATE
1
7 N210025725AB
PLATE
2
8 N210025726AC
PIN
8
9 N510020795AA 87CJPSPB4-4
BOLT
12
10 N510017333AA
Hexagon socket head cap screw M3X5-10.9 A2J (Trivalent)
BOLT
4
11 N510017341AA
Hexagon socket head cap screw M3X8-10.9 A2J (Trivalent)
BOLT
12
12 N510017344AA
Hexagon socket head cap screw M4X10-10.9 A2J (Trivalent)
BOLT
6
13 N510017351AA
Hexagon socket head cap screw M4X16-10.9 A2J (Trivalent)
PLATE
1
14 N210062986AA
Fixed side Separate Clamper
1
15 N610056610AA
Movable side Separate Clamper
1
16 N610056611AA
S16
8
雰囲気
温
調
チャンバー
Atmospheric Temperature Control Chamber
パーツレイアウト
Kit No.
キット品
番
Kit Name
キット名称
N610012862AA
ｾｸｼｮﾝNo.
PARTS LAYOUT
Section No.
S17
Ref
No.
Remarks
R
1
Q't
y
8
雰囲気
温
調
チャンバー
Atmospheric Temperature Control Chamber
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit No.
キット品
番
Kit Name
キット名称
N610012862AA
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
CHAMBER
1
2 N210028142AC
COVER
1
3 N210028143AC
CHAMBER
1
4 N210028144AB
CHAMBER
1
5 N210028145AC
CHAMBER
1
6 N210028146AB
CHAMBER
1
7 N210028147AC
CHAMBER
1
9 N210051658AA
CHAMBER
1
10 N610034776AB
FLANGE
1
11 KXF072WAA00 6132-9099
BRACKET
1
13 KXF0E0KRA00 HD10165(DDA)
SCREW
14
14 N510018282AA
Cross recessed Truss head machine screw M4X8-4.8 A2J (Trivalent)
SCREW
20
15 N510018253AA
Cross recessed Truss head machine screw M3X6-4.8 A2J (Trivalent)
SCREW
6
16 N510018302AA
Cross recessed Truss head machine screw M5X8-4.8 A2J (Trivalent)
BOLT
4
17 N510017351AA
Hexagon socket head cap screw M4X16-10.9 A2J (Trivalent)
WASHER
4
18 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
2
19 N510018479AA
Small round-plain washer 4 10H A2J (Trivalent)
WASHER
4
20 N510018330AA Spring lock washer No.2 4 S A2J (Trivalent)
BRACKET
1
21 N210055037AA
BOLT
2
22 N510017344AA
Hexagon socket head cap screw M4X10-10.9 A2J (Trivalent)
INSULATOR
1
23 N610043169AB
INSULATOR
1
24 N610043186AB
INSULATOR
1
25 N610043187AB
INSULATOR
1
26 N610043188AB
INSULATOR
1
27 N610043189AB
S18