SP18 机械Parts List.pdf - 第78页

8-B マスククリーニングユニット Mask Cleaning Unit パーツレイアウト Ki t N o . キット 品番 Kit N am e キット名称 N610027799AA ｾｸｼｮﾝNo. PARTS LAYOUT Section No.   M61 

100%1 / 206
Ref
No.
Remarks
R
1
Q'ty
8-A
マスククリーニングユニット
Mask Cleaning Unit
ｲﾗｽﾄ
No.
Part No.
品　　名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
番
Kit Name
キット名称
N610027799AA
Part Name
備　　　考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
PLATE
1
1 N210054915AB
PLATE
1
2 N210054960AB
SHAFT
2
4 N210054961AB
SHAFT
3
7 N210041921AA
COUPLING
1
12 N210054963AB
SHAFT
1
14 N210054965AB
COLLAR
1
16 N210041934AA
COLLAR
1
17 N210041935AB
BRACKET
1
25 N210041958AE
DOG
1
26 N210041959AC
BRACKET
1
27 N210055475AB
Paper Brake
1
56 N610027117AA Paper Brake:-U0014
PIN
4
68 N510020590AA MMS3-10
MOTOR
1
69 N510022831AA
S
103H7833-0340
PIN
2
70 N510020599AA MMS4-20
BEARING
1
72 XLC6200ZZ Ball bearing 6200ZZ
COLLAR
1
73 N510020791AA 87SCCN10-10
KEY
1
101 N510020792AA 87KED3-10
SCREW
4
105 N510018375AA
Hexagon socket set screw Cup point M4X8-45H A2J (Trivalent)
BOLT
2
106 N510017337AA
Hexagon socket head cap screw M3X6-10.9 A2J (Trivalent)
BOLT
2
113 N510017381AA
Hexagon socket head cap screw M4X8-10.9 A2J (Trivalent)
BOLT
7
115 N510017346AA
Hexagon socket head cap screw M4X12-10.9 A2J (Trivalent)
BOLT
4
116 N510017351AA
Hexagon socket head cap screw M4X16-10.9 A2J (Trivalent)
BOLT
7
117 N510017354AA
Hexagon socket head cap screw M4X20-10.9 A2J (Trivalent)
BOLT
3
118 N510017361AA
Hexagon socket head cap screw M4X30-10.9 A2J (Trivalent)
BOLT
12
124 N510017433AA
Hexagon socket head cap screw M6X16-10.9 A2J (Trivalent)
WASHER
1
128 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
13
130 N510018501AA
Round finish plain washer 6 10H A2J (Trivalent)
WASHER
2
132 N510018478AA
Small round-plain washer 3 10H A2J (Trivalent)
WASHER
15
133 N510018479AA
Small round-plain washer 4 10H A2J (Trivalent)
SCREW
3
150 N510018280AA
Cross recessed Truss head machine screw M4X6-4.8 A2S (Trivalent)
Fixation Treatment Device
2
153 N610097099AA
SHAFT
2
154 N210053448AB
GUIDE
2
155 N210053449AB
FLANGE
2
156 N210053450AA
BOLT
2
159 N610036641AC
SPRING
2
161 N510023063AA 87UL10-50
SCREW
2
163 N510018370AA
Hexagon socket set screw Cup point M4X4-45H A2J (Trivalent)
TORQUE-LIMITER
1
167 KXF0DXBAA00 OTLC 6-300B
PIN
1
168 KXF0DX9GA00 SPP1.6-8
PIN
2
169 N610042939AA
M60

8-B
マスククリーニングユニット
Mask Cleaning Unit
パーツレイアウト
Ki
t
N
o
.
キット
品番
Kit Name
キット名称
N610027799AA
ｾｸｼｮﾝNo.
PARTS LAYOUT
Section No.
M61

Ref
No.
Remarks
R
1
Q'ty
8-B
マスククリーニングユニット
Mask Cleaning Unit
ｲﾗｽﾄ
No.
Part No.
品　　名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
番
Kit Name
キット名称
N610027799AA
Part Name
備　　　考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
MANIFOLD
1
5 N210042618AA
Simplicity Making to detaching
1
6 N610097100AA
PLATE
1
8 N210041926AD
JOINT
2
10 N210055857AA
BLOCK
2
11 N210041929AB
BRACKET
1
24 N210054971AB
BRACKET
1
40 N210055858AA
BRACKET
1
41 N210055859AA
BRACKET
1
42 N210041974AA
GUIDE
1
43 N210041971AE
BRACKET
1
44 N210055860AA
BRACKET
1
45 N210055861AA
Sensor
1
54 N610026843AA Sensor:-B1011
CYLINDER
1
55 N610026841AA Limit Switch:-B1007-B1010
CYLINDER
1
58 N510015455AA SSD-L-16-15-N
JOINT
4
59 N510021104AA PL4-M5M-0.3
JOINT
3
64 N510011177AA KQ2S16-04S
JOINT
1
65 N431KQ2U1600 KQ2U16-00
JOINT
2
66 N510015459AA KQ2V16-04S
LINEAR-WAY
2
67 N510016065AA SRS9MUU+55LM(01871092K000)
PIN
1
74 KXF0CXLAA00 1017003-30010
BOLT
2
108 N510017305AA
Hexagon socket head cap screw M3X10-10.9 A2J (Trivalent)
BOLT
12
109 N510017308AA
Hexagon socket head cap screw M3X12-10.9 A2J (Trivalent)
BOLT
4
112 N510017376AA
Hexagon socket head cap screw M4X6-10.9 A2J (Trivalent)
BOLT
8
113 N510017381AA
Hexagon socket head cap screw M4X8-10.9 A2J (Trivalent)
BOLT
8
114 N510017344AA
Hexagon socket head cap screw M4X10-10.9 A2J (Trivalent)
BOLT
16
115 N510017346AA
Hexagon socket head cap screw M4X12-10.9 A2J (Trivalent)
BOLT
2
119 N510017364AA
Hexagon socket head cap screw M4X35-10.9 A2J (Trivalent)
BOLT
4
122 N510017395AA
Hexagon socket head cap screw M5X16-10.9 A2J (Trivalent)
WASHER
29
128 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
2
132 N510018478AA
Small round-plain washer 3 10H A2J (Trivalent)
WASHER
6
135 N510020099AA Thick washer for M4
WASHER
2
137 N510018327AA Spring lock washer No.2 3 S A2J (Trivalent)
WASHER
2
138 N510018330AA Spring lock washer No.2 4 S A2J (Trivalent)
COVER
1
145 N210048715AA
JOINT
2
149 KXF029GAA00 KJH04-00
BRACKET
1
170 N210046326AA
M62
