SP18 机械Parts List.pdf - 第76页

8-A マスククリーニングユニット Mask Cleaning Unit パーツレイアウト Ki t N o . キット 品番 Kit N am e キット名称 N610027799AA セクションNo. PARTS LAYOUT Section No.   M59 

100%1 / 206
Ref
No.
Remarks
R
1
Q't
y
7-C
認識
ユニット
Recognition Unit
イラスト
No.
Part No.
品  名品番 数量
R
2
パーツリスト
Kit No.
キット品
Kit Name
キット名称
N610025641AA
Part Name
備   考
セクションNo.
PARTS LIST
Section No.
R
3
PLUG
1
9 N210040704AA
A
LENS COVER UNIT
1
25 N610026542AB
BRACKET
1
26 N210048776AA
GLASS
1
27 N510015440AA OPS-36X36
Cylinder
1
28 N610026844AA Limit Switch:-B1012
BRACKET
1
37 N210058279AA
BRACKET
1
38 N210058274AB
BRACKET
1
39 N210040281AA
COVER
1
40 N210058275AA
COVER
1
41 N210040279AA
BRACKET
1
42 N210040277AA
JOINT
1
63 N431KQ2V04M5 KQ2V04-M5
GRIP
1
64 N510020879AA GHRS-19XM6
BOLT
5
65 N510017539AA
Hexagon socket button head screw M5X12-10.9 A2J (Trivalent)
BOLT
4
66 N510017556AA
Hexagon socket button head screw M6X15-10.9 A2J (Trivalent)
SCREW
2
67 N510018247AA
Cross recessed Truss head machine screw M3X3-4.8 A2J (Trivalent)
SCREW
3
68 N510018278AA
Cross recessed Truss head machine screw M4X5-4.8 A2S (Trivalent)
BOLT
2
69 N510017416AA
Hexagon socket head cap screw M5X70-10.9 A2J (Trivalent)
BOLT
2
71 N510017534AA
Hexagon socket button head screw M4X6-10.9 A2J (Trivalent)
BOLT
4
73 N510017305AA
Hexagon socket head cap screw M3X10-10.9 A2J (Trivalent)
BOLT
2
75 N510017376AA
Hexagon socket head cap screw M4X6-10.9 A2J (Trivalent)
BOLT
2
77 N510017344AA
Hexagon socket head cap screw M4X10-10.9 A2J (Trivalent)
WASHER
4
85 N510018494AA
Round finish plain washer 3 10H A2J (Trivalent)
WASHER
6
86 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
5
87 N510018499AA
Round finish plain washer 5 10H A2J (Trivalent)
WASHER
5
88 N510018501AA
Round finish plain washer 6 10H A2J (Trivalent)
WASHER
2
91 N510018480AA
Small round-plain washer 5 10H A2J (Trivalent)
WASHER
4
94 N510018327AA Spring lock washer No.2 3 S A2J (Trivalent)
NUT
1
96 N510017866AA
Hexagon nut Type-1 Best class M6-6H-10T A2J (Trivalent)
Sensor
1
99 N610027116AA Sensor:-B1005
Sensor
1
100 N610026845AA Sensor:-B1013
SCREW
3
101 N510018283AA
Cross recessed Truss head machine screw M4X8-4.8 A2S (Trivalent)
SPEED-CONTROLLER
1
106 N406AS12-035 AS1211F-M5-04S
BLOCK
1
107 N210058172AA
BOLT
2
108 N510017516AA
Hexagon socket button head screw M4X10-10.9 A2J (Trivalent)
SCREW
2
109 N510018252AA
Cross recessed Truss head machine screw M3X5-4.8 A2S (Trivalent)
M58

8-A
マスククリーニングユニット
Mask Cleaning Unit
パーツレイアウト
Ki
t
N
o
.
キット
品番
Kit Name
キット名称
N610027799AA
セクションNo.
PARTS LAYOUT
Section No.
M59

Ref
No.
Remarks
R
1
Q'ty
8-A
マスククリーニングユニット
Mask Cleaning Unit
イラスト
No.
Part No.
品  名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
Kit Name
キット名称
N610027799AA
Part Name
備   考
セクションNo.
PARTS LIST
Section No.
R
3
PLATE
1
1 N210054915AB
PLATE
1
2 N210054960AB
SHAFT
2
4 N210054961AB
SHAFT
3
7 N210041921AA
COUPLING
1
12 N210054963AB
SHAFT
1
14 N210054965AB
COLLAR
1
16 N210041934AA
COLLAR
1
17 N210041935AB
BRACKET
1
25 N210041958AE
DOG
1
26 N210041959AC
BRACKET
1
27 N210055475AB
Paper Brake
1
56 N610027117AA Paper Brake:-U0014
PIN
4
68 N510020590AA MMS3-10
MOTOR
1
69 N510022831AA
S
103H7833-0340
PIN
2
70 N510020599AA MMS4-20
BEARING
1
72 XLC6200ZZ Ball bearing 6200ZZ
COLLAR
1
73 N510020791AA 87SCCN10-10
KEY
1
101 N510020792AA 87KED3-10
SCREW
4
105 N510018375AA
Hexagon socket set screw Cup point M4X8-45H A2J (Trivalent)
BOLT
2
106 N510017337AA
Hexagon socket head cap screw M3X6-10.9 A2J (Trivalent)
BOLT
2
113 N510017381AA
Hexagon socket head cap screw M4X8-10.9 A2J (Trivalent)
BOLT
7
115 N510017346AA
Hexagon socket head cap screw M4X12-10.9 A2J (Trivalent)
BOLT
4
116 N510017351AA
Hexagon socket head cap screw M4X16-10.9 A2J (Trivalent)
BOLT
7
117 N510017354AA
Hexagon socket head cap screw M4X20-10.9 A2J (Trivalent)
BOLT
3
118 N510017361AA
Hexagon socket head cap screw M4X30-10.9 A2J (Trivalent)
BOLT
12
124 N510017433AA
Hexagon socket head cap screw M6X16-10.9 A2J (Trivalent)
WASHER
1
128 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
13
130 N510018501AA
Round finish plain washer 6 10H A2J (Trivalent)
WASHER
2
132 N510018478AA
Small round-plain washer 3 10H A2J (Trivalent)
WASHER
15
133 N510018479AA
Small round-plain washer 4 10H A2J (Trivalent)
SCREW
3
150 N510018280AA
Cross recessed Truss head machine screw M4X6-4.8 A2S (Trivalent)
Fixation Treatment Device
2
153 N610097099AA
SHAFT
2
154 N210053448AB
GUIDE
2
155 N210053449AB
FLANGE
2
156 N210053450AA
BOLT
2
159 N610036641AC
SPRING
2
161 N510023063AA 87UL10-50
SCREW
2
163 N510018370AA
Hexagon socket set screw Cup point M4X4-45H A2J (Trivalent)
TORQUE-LIMITER
1
167 KXF0DXBAA00 OTLC 6-300B
PIN
1
168 KXF0DX9GA00 SPP1.6-8
PIN
2
169 N610042939AA
M60
