P-0320-001.pdf - 第109页

Fig. E1 Fig. E 1-2 1009-001

1009-001

Fig. E1

コプラナリティチェックユニット

(GS-IC120)

COPLANARITY CHECK UNIT(GS-IC120)

Fig. E1-2

架台上ユニット２

Upper Frame Unit 2

194

194

197

1A1

See Fig E3-3

1B2

1B2

(BASE:Document No. P-310-00X

UNIT-4 Fig.E1-2)

197

1A1

See Fig E3-3

1B2

1B2

Fig. E1

Fig. E1-2

1009-001

Key No. PART No. PART NAME Q’ty

REMARKS

NOTE

194 221HA007 WASHER 4 20918010CU-004

197 221HA107 WASHER 4 20918010CU-007

1A1 221AA057 ROHS_HEX-SCT 4 20918010CU-011

1B2 23N30738 ACCESS_WIRING(M 2 20918010CU-022

Fig. E1-2

Fig. E1

1009-001

GS-IC120