P-0320-001.pdf - 第45页

GS-IC1 10 1009-001 GS-IC1 10 SIGMA-G5 Fig. E3-3 Sensor Head  Fig. E3-3 Sensor Head  SIGMA-G4 Fig. D2-3 CPU Box For Coplanarity  CPU  Fig. D2-3 CPU Box For Coplanarity  CPU 