2019-BTU-web-Vacuum-reflow-Dimock.pdf - 第14页
Equali zation Rate at w hich the chambe r is returned to atmospheric pressure 0 100 200 300 400 500 600 700 800 Currently no know n limitations Experime nts done at ~ 85 T orr/sec
0
100
200
300
400
500
600
700
800
Hold time
The time at the chosen vacuum level
Hold times as short as 1 sec
and long as a few minutes are possible.
At 1 sec there is little time for voids to
move to the surface
Times greater than 40 seconds have
been proven to not be needed
Equalization
Rate at which the chamber is
returned to atmospheric pressure
0
100
200
300
400
500
600
700
800
Currently no known limitations
Experiments done at ~ 85 Torr/sec
Trials at the Universal Instruments Advanced Process Lab
Mike Meilunas Universal Instruments
Arvind Srinivasan Karthikeyan Auburn University
• Two Layer Test Board
• 78x104x1mm
• Immersion Sn and ENIG finishes
• MLF: 4, 8 and 12mm bodies
• WLCSP: 0.4mm pitch
• LGA: 0.4mm pitch
• SMR: 2512 and 1206
• BGA: 1.0mm pitch
• D2PAK