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14 安灯信号连接器规格 ................................................................................................ 2- 18 输出规格 ...................................................................................................…

前言 .............................................................................................................................. 1

安全注意事项.................................................................................................................... 5

安全要点 ........................................................................................................................... 7

使用注意事项.................................................................................................................... 8

关联手册的种类与内容 ................................................................................................... 10

本手册的使用方法 ...........................................................................................................11

本手册的阅览方法 .......................................................................................................... 12

目录 ............................................................................................................................ 13

第1章概要 ................................................................................................................... 1-1

1.1 本装置概要 ................................................................................................................ 1-1

1.2 系统框图 ................................................................................................................... 1-2

各部分名称 ....................................................................................................................... 1-3

第2章装置规格 ............................................................................................................ 2-1

2.1 通用规格 ................................................................................................................... 2-1

2.2 检查对象基板 ............................................................................................................ 2-3

检查对象基板 ............................................................................................................. 2-3

基板尺寸 .................................................................................................................... 2-3

基板厚度 .................................................................................................................... 2-3

基板重量 .................................................................................................................... 2-3

基板弯曲 .................................................................................................................... 2-3

可贴装元件范围 ......................................................................................................... 2-3

基板温度 .................................................................................................................... 2-3

用于基板检测的切口宽度及范围 ................................................................................. 2-3

2.3 上下游 I/F .................................................................................................................. 2-9

信号时序 .................................................................................................................... 2-9

上下游连接器规格 .................................................................................................... 2-11

输入输出内部连接 .................................................................................................... 2-12

2.4 RS-232C 通信规格 .................................................................................................. 2-13

通信方式 .................................................................................................................. 2-13

传输的数据形式 ....................................................................................................... 2-13

引脚配置及接线 ....................................................................................................... 2-14

2.5 外部连锁装置 I/F .................................................................................................... 2-15

运行环境 .................................................................................................................. 2-15

外部联锁连接器规格 ................................................................................................ 2-16

输入/输出内部链接 ................................................................................................... 2-17

2.6 安灯信号用 I/F ........................................................................................................ 2-18

安灯信号连接器规格 ................................................................................................ 2-18

输出规格 .................................................................................................................. 2-18

第3章安装、移动时的注意事项 ................................................................................... 3-1

3.1 安装 .......................................................................................................................... 3-1

安装空间 .................................................................................................................... 3-1

移动 3-1

3.2 供气管的连接 ............................................................................................................ 3-2

供气管连接步骤 ......................................................................................................... 3-2

3.3 电源连接 ................................................................................................................... 3-3

电源连接步骤 ............................................................................................................. 3-3

第4章日常运行 ............................................................................................................ 4-1

4.1 上电与断电 ................................................................................................................ 4-1

上电 4-1

断电 4-4

4.2 正面门的开与关 ......................................................................................................... 4-5

4.3 用手动阀排放活动挡板空气余压的方法 ..................................................................... 4-6

第5章日常检查 ............................................................................................................ 5-1

5.1 上电前的检查 ............................................................................................................ 5-1

装置内部的检查 ......................................................................................................... 5-2

气压调节器的检查 ...................................................................................................... 5-3

确认供电电源 ............................................................................................................. 5-4

电路保护器的检查 ...................................................................................................... 5-4

5.2 上电后的检查 ............................................................................................................ 5-5

外围设备、装置的稳定状态检查 ................................................................................. 5-5

紧急停止功能检查 ...................................................................................................... 5-5

运行中的异常检查 ...................................................................................................... 5-5

照明检查 .................................................................................................................... 5-5

5.3 日常检查确认表 ......................................................................................................... 5-7

第6章定期检修及保养 ................................................................................................. 6-1

6.1 驱动系统上油 ............................................................................................................ 6-1

润滑脂加注枪 ............................................................................................................. 6-2

上油方法 .................................................................................................................... 6-2

XY 轴滚珠丝杆螺纹套位置 ......................................................................................... 6-3

6.2 传送带的更换与调整 .................................................................................................. 6-4

6.3 UPS 电池的更换 ........................................................................................................ 6-6

6.4 供气气压的调节 ....................................................................................................... 6-10

6.5 各部分的清洁 .......................................................................................................... 6-11

白色板的清洁 ........................................................................................................... 6-11

测量精度验证板的清洁 ............................................................................................. 6-11

传送带的清洁 ........................................................................................................... 6-11

照明扩散板的清洁 .................................................................................................... 6-12

基板检测传感器的清洁 ............................................................................................. 6-13

装置内部的清洁 ....................................................................................................... 6-13

6.6 照明校准方法 .......................................................................................................... 6-14

6.7 测量精度验证方法 ................................................................................................... 6-14

第7章易耗品一览 ......................................................................................................... 7-1

第8章故障排除 ............................................................................................................ 8-1

8.1 异常时的对策 ............................................................................................................ 8-1

8.2 紧急停止 ................................................................................................................... 8-1

8.3 基板卡住时的取出方法 .............................................................................................. 8-1

8.4 强制 PASS 模式 ........................................................................................................ 8-2

第9章保管、废弃 ......................................................................................................... 9-1

9.1 保管场所 ................................................................................................................... 9-1

9.2 废弃 .......................................................................................................................... 9-1