5OM-1840-001w_F8S.pdf - 第75页
5OM-1840 1604-001 2-B
5OM-1840
1604-001 2-A
Chapter 2
Sensor and Load Layout
This chapter indicates where the sensors and loads are located in each
section.
As this contains highly sophisticated contents, it should carefully be
referred to.
5OM-1840
1604-001 2-B
5OM-1840
Sensor and Load Layout
2-1-1
1604-001
Layout under the Base
Vacuum Pump
Front View
Manifold 1
Manifold 2
Vacuum/collective
disposal valve
Air Supply 2
Air Supply 1
Ｓ144
Ｍ66
Ｙ0938
Ｙ0939
Vacuum/collective
disposal valve
Ｙ0638
Ｙ0639
Symbol Name Symbol Name
M66 Vacuum Pump
Y0638 Vacuum/Collective Disposal Change-Over Y0938 Vacuum/Collective Disposal Change-Over
Y0639
High-Speed/Multi-Functional Head Change-Over
Y0939
High-Speed/Multi-Functional Head Change-Over
S141 Air Pressure Drop Detection