Fast_Firing_System_EN.pdf - 第6页
6 Speedre Firing Furnace Processing up t o 5300 wafers/hour Rehm Speedre Firing Furnace off ers a range of advanced pro - cess features and thermal contr ol that enable PV manufactur - ers to move their processes to en…
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VOC Thermal Oxidizer
for a clean process
Drying solar pastes produces up to 30 % of the weight of the printed paste in volatile organic compounds
(VOC). The VOC’s have to be removed from the process chamber via exhaust to avoid contamination of the
process chamber, VOC’s condensation damage on the solar cell and obstruction due to odor development
in the vicinity of the dryer.
The Rehm Thermal Oxidizer will expose the exhaust volume to over 750 °C in order to destroy all VOC’s,
such as alcohols, toluene and terpineol with an efciency of up to 99,9 %. The side products of this process
are water vapor and carbon dioxide and make this a sustainable environmentally friendly process in com-
pliance with legal standards such as the TA Luft, Germany. Even with the higher throughput in modern cell
production, the RehmT hermal Oxidizer can handle the increased VOC content.
Data and facts
VOC destruction results
Run No. 1 Run No. 2 Run No. 3
Oxidizer Inlet VOC
Concentration (g/m³)
1,64 1,71 2,07
Oxidizer Outlet VOC
Concentration (g/m³)
0,00273 0,00145 0,00305
VOC Destruction Rate (%) 99,8 99,9 99,8
VOC Thermal Oxidizer/COMPACT
Max. VOC destruction efciency 99,9 %
Operating temperature 750 °C
Volumetric flow raw gas 110 Nm³ / h
Residence time 1s
Dimensions H: 1400 mm
W: 1200 mm
L: 1200 mm
measured during production at leading solar cell manufacturers
Oxidizer Integrated
REHM SOLAR DRYER
OTHER SOLAR DRYERS
Oxidizer Retrot
Oxidizer Retrot
Oxidizer Stand-alone
Oxidizer Stand-alone
Rehm Thermal Oxidizer comes
integrated into the Aluminum
Back side Dryer or can be retrot-
ted as a top-mounted or stand-
alone unit to a number of drying
systems in the market.
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Speedre Firing Furnace
Processing up to 5300 wafers/hour
Rehm Speedre Firing Furnace offers a range of advanced pro-
cess features and thermal control that enable PV manufactur-
ers to move their processes to entirely new levels of efciency
and yield. The demand for high process flexibility, higher wafer
throughput and decreasing cycle times has led to the latest
innovation in the eld of ring systems.
The modularity of the Speedre zones allows the user to
achieve full polymer binder burn off and fast ring at tem-
peratures up to 900 °C while processing 5300 wafers/hour.
Even at belt speeds of up to 10 m/min the Rehm Fast Firing
Furnace offers a large process window in the peak zones,
allowing for the most customized temperature proles.
2015 2017 2018
Seconds
2
1,5
1
2005 2010 2015
0
Wafer / hour
1000
5000
6000
Wafer/hDual LaneSingle Lane
Single lane vs. Dual lane [%]
0
20
40
60
80
100
120
2000
3000
4000
Development of wafer production/dual lane conguration Increased wafer throughput
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From drying to ring
Safe, vibration-free, reliable
Your solar cells will run through various sections of the system during the drying and ring process.
Secure transportation is a key entity when it comes to continuous processes.
The highest assembly skills, the top quality materials and the advanced designed concepts of our trans-
port system guarantee low-vibration transport of the wafers. The horizontal throughput ovens guarantee
a safe transport through the oven. The mesh belt is equipped with stand offs for secure transport of the
wafers.
Reliable, failure-free production guaranteed
by absolutely safe transport
Precise and repeatable adjustment of the
transport speed
Reduced maintenance, transport drive mechanism
is outside of the process chamber
Low-vibration transport of the wafers guaranteed
low
maintenance
expenses
Mesh belt with stand offs