Fast_Firing_System_EN.pdf - 第7页
7 F rom dr ying to ring Safe, vibration-fr ee, reliable Y our solar cells will run through various sections of the system during the drying and ring process. Secure transportation is a key entity when it comes to conti…
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Speedre Firing Furnace
Processing up to 5300 wafers/hour
Rehm Speedre Firing Furnace offers a range of advanced pro-
cess features and thermal control that enable PV manufactur-
ers to move their processes to entirely new levels of efciency
and yield. The demand for high process flexibility, higher wafer
throughput and decreasing cycle times has led to the latest
innovation in the eld of ring systems.
The modularity of the Speedre zones allows the user to
achieve full polymer binder burn off and fast ring at tem-
peratures up to 900 °C while processing 5300 wafers/hour.
Even at belt speeds of up to 10 m/min the Rehm Fast Firing
Furnace offers a large process window in the peak zones,
allowing for the most customized temperature proles.
2015 2017 2018
Seconds
2
1,5
1
2005 2010 2015
0
Wafer / hour
1000
5000
6000
Wafer/hDual LaneSingle Lane
Single lane vs. Dual lane [%]
0
20
40
60
80
100
120
2000
3000
4000
Development of wafer production/dual lane conguration Increased wafer throughput
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From drying to ring
Safe, vibration-free, reliable
Your solar cells will run through various sections of the system during the drying and ring process.
Secure transportation is a key entity when it comes to continuous processes.
The highest assembly skills, the top quality materials and the advanced designed concepts of our trans-
port system guarantee low-vibration transport of the wafers. The horizontal throughput ovens guarantee
a safe transport through the oven. The mesh belt is equipped with stand offs for secure transport of the
wafers.
Reliable, failure-free production guaranteed
by absolutely safe transport
Precise and repeatable adjustment of the
transport speed
Reduced maintenance, transport drive mechanism
is outside of the process chamber
Low-vibration transport of the wafers guaranteed
low
maintenance
expenses
Mesh belt with stand offs
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Dual chamber design with cross prole
Dual Chamber Design
for precise proling of each lane
Flexible proling
for precice process control
An insulating wall separating the lanes just above
the belt divides the chamber into two separately
controllable process chambers. Each chamber
has its own sets of specially designed IR lamps
and thermocouples providing the possibility to run
completely different proles independently from
each other.
T °C
Lane 1 Lane 2
With the new dual chamber design, the
Speedre can control the temperature of
each lane separately, making tempera-
ture fluctuations due to unevenly loaded
lanes a problem from the past.