Fast_Firing_System_EN.pdf - 第8页
8 Dual chamber design with cross prole Dual Chamber Design for precise pr oling of each lane Flexible proling for precice pr ocess control An insulating wall separating the lanes just above the belt divides the chambe…
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From drying to ring
Safe, vibration-free, reliable
Your solar cells will run through various sections of the system during the drying and ring process.
Secure transportation is a key entity when it comes to continuous processes.
The highest assembly skills, the top quality materials and the advanced designed concepts of our trans-
port system guarantee low-vibration transport of the wafers. The horizontal throughput ovens guarantee
a safe transport through the oven. The mesh belt is equipped with stand offs for secure transport of the
wafers.
Reliable, failure-free production guaranteed
by absolutely safe transport
Precise and repeatable adjustment of the
transport speed
Reduced maintenance, transport drive mechanism
is outside of the process chamber
Low-vibration transport of the wafers guaranteed
low
maintenance
expenses
Mesh belt with stand offs
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Dual chamber design with cross prole
Dual Chamber Design
for precise proling of each lane
Flexible proling
for precice process control
An insulating wall separating the lanes just above
the belt divides the chamber into two separately
controllable process chambers. Each chamber
has its own sets of specially designed IR lamps
and thermocouples providing the possibility to run
completely different proles independently from
each other.
T °C
Lane 1 Lane 2
With the new dual chamber design, the
Speedre can control the temperature of
each lane separately, making tempera-
ture fluctuations due to unevenly loaded
lanes a problem from the past.
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Large process window
at 5300 w/h due to modularity of zones
Large process window through higher zone flexibility
The modularity of the Speedre zones allows the
user to achieve full polymer binder burn off and
fast ring at temperatures up to 900 °C while
processing 5300 wafers/hour. Even at belt speeds
of up to 10 m/min the Rehm Fast ring furnace
offers a large process window in the peak zones,
allowing for the most customized temperature
proles.
T °C
850 °C
t (min)
10 m /min