5OM-1286-007_w.pdf - 第73页
2-12 AJQEPED-ID Layout of Sensors and Loads Nozzle Stockers 0606-005 Layout of Sensors and Loads Nozzle Stockers Symbol Name Symbol Name -B0918 Nozzle Stocker Lower Limit Detection 1 -B0920 Nozzle Stocker Shutter Open Ch…
2-11
AJQEPED-ID
0606-005
Layout of Sensors and Loads Positioning
Layout of Sensors and Loads Positioning
Symbol Name Symbol Name
-B0508 Lifted Feeder Detection (A) -B0913 Lifting Section Feeder Base Detection 2
-B0509 Lifted Feeder Detection (B) -B0914 Cylinder Upper Limit Detection
-B0510 Lifted Suppressor Detection -B0915 Cylinder Lower Limit Detection
-B0910
Feeder Base Y Direction Positioning Check 1
-B0932 Feeder Base Ascending
-B0911
Feeder Base Y Direction Positioning Check 2
-B0933 Feeder Base Descending
-B0912 Lifting Section Feeder Base Detection 1
2-12
AJQEPED-ID
Layout of Sensors and Loads Nozzle Stockers
0606-005
Layout of Sensors and Loads Nozzle Stockers
Symbol Name Symbol Name
-B0918 Nozzle Stocker Lower Limit Detection 1
-B0920 Nozzle Stocker Shutter Open Check 1
-B0922 Nozzle Stocker Clamp Check 1
-Y0935 Nozzle Stocker Shutter Open
-Y0936 Nozzle Stocker
Ascending 1
3-A
AJQEPED-ID
0606-005
Chapter 3
Parts Location
This chapter describes the layout, etc., of each section.
As this contains highly sophisticated contents, it should
carefully be referred to.