2OM-1150-001_w.pdf - 第166页
3 3 3 3 3 章 章 章 章 章 0004-002 3 章 1 AFQ0 1 JINP 保养 保养 保养 保养 保养 · · · · · 维修 维修 维修 维修 维修 ˆó•ü‚ð•s‚¤‚½‚ß‚É•K—v‚ÈŠe•íƒf•[ƒ^‚ɂ‚¢‚Ä‹L•Ú‚µ‚Ä‚¢‚Ü‚·•B 针对本装置保养 针对本装置保养 针对本装置保养 针对本装置保养 针对本装置保养· 维修专业人员，就定期保养 维修专业人员，就定期保养 维修专业人员，就定…
异常异常
异常异常
异常
IDID
IDID
ID
项目项目
项目项目
项目
内容内容
内容内容
内容
21220002 1 22000
21220002 1 22000
2122000
Illegal OperationIllegal Operation
Illegal OperationIllegal Operation
Illegal Operation
Screen was not found.Screen was not found.
Screen was not found.Screen was not found.
Screen was not found.
(操作 Miss) (没有找到屏幕。)
21230002 1 23000
21230002 1 23000
2123000
Illegal OperationIllegal Operation
Illegal OperationIllegal Operation
Illegal Operation
Reference position was not identified.Reference position was not identified.
Reference position was not identified.Reference position was not identified.
Reference position was not identified.
(操作 Miss) ( 没有设定基准坐标。)
21240002 1 24000
21240002 1 24000
2124000
Illegal OperationIllegal Operation
Illegal OperationIllegal Operation
Illegal Operation
Screen was on the holder.Screen was on the holder.
Screen was on the holder.Screen was on the holder.
Screen was on the holder.
(操作 Miss)
22010002201000
22010002201000
2201000
Vacuum PumpVacuum Pump
Vacuum PumpVacuum Pump
Vacuum Pump
Vacuum sw was not ON, within specified time.Vacuum sw was not ON, within specified time.
Vacuum sw was not ON, within specified time.Vacuum sw was not ON, within specified time.
Vacuum sw was not ON, within specified time.
(真空泵)(没有在所定时间内打开真空开关。)
22020002202000
22020002202000
2202000
Vacuum PumpVacuum Pump
Vacuum PumpVacuum Pump
Vacuum Pump
Cleaning side change timeoverCleaning side change timeover
Cleaning side change timeoverCleaning side change timeover
Cleaning side change timeover
(真空泵) (Cleaning吸引侧切换超时OFF)
22030002203000
22030002203000
2203000
Vacuum PumpVacuum Pump
Vacuum PumpVacuum Pump
Vacuum Pump
Vacuum plate side change timeover.Vacuum plate side change timeover.
Vacuum plate side change timeover.Vacuum plate side change timeover.
Vacuum plate side change timeover.
(真空泵) (Chuck吸引侧切换超时OFF)
2.3 2.3
2.3 2.3
2.3
异常异常
异常异常
异常
IDID
IDID
ID
和复原方法和复原方法
和复原方法和复原方法
和复原方法
0008-001 2章2-26 AFQ01JTRP
33
33
3
章章
章章
章
0004-002 3章 1 AFQ01JINP
保养保养
保养保养
保养
··
··
·
维修维修
维修维修
维修
ˆó•ü‚ð•s‚¤‚½‚ß‚É•K—v‚ÈŠe•íƒf•[ƒ^‚ɂ‚¢‚Ä‹L•Ú‚µ‚Ä‚¢‚Ü‚·•B
针对本装置保养针对本装置保养
针对本装置保养针对本装置保养
针对本装置保养·
维修专业人员，就定期保养维修专业人员，就定期保养
维修专业人员，就定期保养维修专业人员，就定期保养
维修专业人员，就定期保养·
维修维修
维修维修
维修
等，进行说明。等，进行说明。
等，进行说明。等，进行说明。
等，进行说明。
记载内容记载内容
记载内容记载内容
记载内容
::
::
:
定期保养定期保养
定期保养定期保养
定期保养·
维修、易损耗元件和保修品单、维修、易损耗元件和保修品单、
维修、易损耗元件和保修品单、维修、易损耗元件和保修品单、
维修、易损耗元件和保修品单、
排气管图、电气回路图等排气管图、电气回路图等
排气管图、电气回路图等排气管图、电气回路图等
排气管图、电气回路图等
0004-002 3章 2 AFQ01JINP