FlexTRAK 2MB Assembly Manual.pdf - 第15页
9 © 2023 Nordson Corporation 4 - Recomme nde d Maintenance 4.1 Overview User-performed mainten ance required fo r t h e FlexTRAK-2MB Electrode Fixturing Assembly is minimal. Ho wever, regular attention to the suggested m…
FlexTRAK Series 2MB Electrode Fixturing Addendum Parts Replacement
8 © 2023 Nordson Corporation
Item Description
7 ELECTRODE PLATE
8 ELECTRODE STANDOFF
9 ELECTRODE STANDOFF
Figure 3-4 Aluminum Electrode Fixturing Assembly for 160mm-Process Carrier
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9 © 2023 Nordson Corporation
4 - Recommended Maintenance
4.1 Overview
User-performed maintenance required for the FlexTRAK-2MB Electrode Fixturing
Assembly is minimal. However, regular attention to the suggested maintenance tasks
listed in Table 4-1 will help to ensure proper operation and maximum availability of
the system.
Note: Maintenance interval depends on the level of system use. Intervals specified
in Table 4-1 are for systems averaging 12 hours or more per day.
Table 4-1 Recommended Maintenance
Task List Interval Reference Section
Electrode Plate Quarterly See 4.2 Inspection and Cleaning
Electrode Standoff Quarterly See 4.2 Inspection and Cleaning
Tools and Materials Needed
r
Isopropyl
a
lcohol
r
Personal
p
rotective
e
quipment
r
Clean, lint
-
free cloth
r
Phillips
screw driver
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FlexTRAK Series 2MB Electrode Fixturing Addendum Recommended Maintenance
10 © 2023 Nordson Corporation
4.2 Inspection and Cleaning
To check the electrode fixturing assembly:
1. Raise the reaction chamber lid using the controls in manual mode. Refer to the
FlexTRAK-F3 Installation, Operation, and Maintenance manual.
2. Shut down the FlexTRAK System.
CAUTION! The reaction chamber may be hot. Make sure that it has
cooled down before proceeding to the next step.
3. Remove the electrode fixturing assembly from the chamber.
4. Clean the exposed surfaces of the electrode plate with a clean, lint-free cloth
moistened with isopropyl alcohol.
CAUTION! Isopropyl alcohol is a skin and eye irritant. To prevent injury,
always use gloves and eye protection. See Appendix C – Material Safety
Information in the FlexTRAK-F3 Installation, Operation, and Maintenance
Manual for details.
5. Visually inspect for excessive wear or discoloration. If any such damage is found, it
may need replacing.
6. Reassemble the electrode fixturing assembly.
7. Restart the plasma system when ready.