FlexTRAK 2MB Assembly Manual.pdf - 第17页

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FlexTRAK Series 2MB Electrode Fixturing Addendum Recommended Maintenance

4.2 Inspection and Cleaning

To check the electrode fixturing assembly:

1. Raise the reaction chamber lid using the controls in manual mode. Refer to the

FlexTRAK-F3 Installation, Operation, and Maintenance manual.

2. Shut down the FlexTRAK System.

CAUTION! The reaction chamber may be hot. Make sure that it has

cooled down before proceeding to the next step.

3. Remove the electrode fixturing assembly from the chamber.

4. Clean the exposed surfaces of the electrode plate with a clean, lint-free cloth

moistened with isopropyl alcohol.

CAUTION! Isopropyl alcohol is a skin and eye irritant. To prevent injury,

always use gloves and eye protection. See Appendix C – Material Safety

Information in the FlexTRAK-F3 Installation, Operation, and Maintenance

Manual for details.

5. Visually inspect for excessive wear or discoloration. If any such damage is found, it

may need replacing.

6. Reassemble the electrode fixturing assembly.

7. Restart the plasma system when ready.

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