FlexTRAK 2MB Assembly Manual.pdf - 第8页
FlexTRAK Series 2MB Electrode Fixtur in g Addendum Introduction 2 © 2023 Nordson Corporation Figure 1-1 FlexTRAK 2M B Chamber Assembly Item Description Item Description 1 Chamber Lid Asse mbly 3 Chamber Base Assembl y 2 …
© 2023 Nordson Corporation 1
1 - Introduction
1.1 Overview
The FlexTRAK system’s process chamber has a unique ability to convert from one
fixture to another, offering different platforms for industry-standard products. The
patented plasma chamber design provides exceptional etch uniformity and process
repeatability. The universal architecture of the FlexTRAK system accommodates a
wide range of products within the same system. The work space available for process
work can range from 325mm (12.8”) wide x 325 (12.8”) long and up to 19mm (0.75”)
high.
The FlexTRAK-2MB system can adapt to a number of configurations. The Nordson
March process application team will help develop and recommend the best
configuration for the application. The following 2MB Electrode Fixtures are available:
r Aluminum Electrode Fixture for 75mm-Process Carriers
r Aluminum Electrode Fixture for 136mm-Process Carriers
r Ceramic Electrode Fixture for 136mm-Process Carriers
r Aluminum Electrode Fixture for 160mm-Process Carriers
These fixtures are detailed in 3.5 2MB Electrode Fixturing Assembly Exploded Views.
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FlexTRAK Series 2MB Electrode Fixturing Addendum Introduction
2 © 2023 Nordson Corporation
Figure 1-1 FlexTRAK 2MB Chamber Assembly
Item Description Item Description
1 Chamber Lid Assembly 3 Chamber Base Assembly
2 2MB Fixture Assembly 4 Chamber Lift Assembly
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© 2023 Nordson Corporation 3
2 - Safety
2.1 Overview
This section provides safety guidelines that should be followed when servicing the 2MB
Electrode Fixturing Assembly. These guidelines ensure personal safety and protect
equipment during installation, operation, maintenance, troubleshooting, and other
potentially dangerous procedures.
To service the 2MB Electrode Fixturing Assembly, you must be trained by Nordson
MARCH. It is essential that every person fully understands all hazards, risks, and
safety precautions. Refer to the Safety section in the FlexTRAK Installation, Operation,
and Maintenance Manual for additional information.
2.2 Warning Symbol Definitions
Table 2-1 Warning Symbols
Symbol Description
Danger/Warning/Caution: Warns personnel that special caution must be
exercised. Cautionary text next to this symbol stresses the importance of
following proper safety, operation, or maintenance procedures. Otherwise,
personal safety and equipment reliability could be affected.
Thermal Hazard: Warns personnel of hot surfaces that may cause burns if
touched.
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