FlexTRAK 2MB Assembly Manual.pdf - 第6页

在线预览 FlexTRAK 2MB Assembly Manual.pdf PDF 文档。

Table of Contents

1 -

Introduction ............................................................................................................. 1

1.1

Overview ..................................................................................................................................... 1

2 -

Safety ....................................................................................................................... 3

2.1

Overview ..................................................................................................................................... 3

2.2

Warning Symbol Definitions ........................................................................................................ 3

3 -

Parts Replacement ................................................................................................. 4

3.1

Overview ..................................................................................................................................... 4

3.2

Parts Ordering Information ......................................................................................................... 4

3.3

Shipping ...................................................................................................................................... 4

3.4

Parts Warranty ............................................................................................................................ 4

3.5

Exploded Views .......................................................................................................................... 5

4 -

Recommended Maintenance ................................................................................. 9

4.1

Overview ..................................................................................................................................... 9

4.2

Inspection and Cleaning ........................................................................................................... 10

1 - Introduction

1.1 Overview

The FlexTRAK system’s process chamber has a unique ability to convert from one

fixture to another, offering different platforms for industry-standard products. The

patented plasma chamber design provides exceptional etch uniformity and process

repeatability. The universal architecture of the FlexTRAK system accommodates a

wide range of products within the same system. The work space available for process

work can range from 325mm (12.8”) wide x 325 (12.8”) long and up to 19mm (0.75”)

high.

The FlexTRAK-2MB system can adapt to a number of configurations. The Nordson

March process application team will help develop and recommend the best

configuration for the application. The following 2MB Electrode Fixtures are available:

r Aluminum Electrode Fixture for 75mm-Process Carriers

r Aluminum Electrode Fixture for 136mm-Process Carriers

r Ceramic Electrode Fixture for 136mm-Process Carriers

r Aluminum Electrode Fixture for 160mm-Process Carriers

These fixtures are detailed in 3.5 2MB Electrode Fixturing Assembly Exploded Views.