FlexTRAK 2MB Assembly Manual.pdf - 第7页
© 2023 Nordson Corporation 1 1 - Introduction 1.1 Overview The FlexTRAK system’s process chamber ha s a unique abi lity t o conver t from one fixture to ano ther, off e ring different platforms for i ndustry-standard pr …
© 2023 Nordson Corporation 1
1 - Introduction
1.1 Overview
The FlexTRAK system’s process chamber has a unique ability to convert from one
fixture to another, offering different platforms for industry-standard products. The
patented plasma chamber design provides exceptional etch uniformity and process
repeatability. The universal architecture of the FlexTRAK system accommodates a
wide range of products within the same system. The work space available for process
work can range from 325mm (12.8”) wide x 325 (12.8”) long and up to 19mm (0.75”)
high.
The FlexTRAK-2MB system can adapt to a number of configurations. The Nordson
March process application team will help develop and recommend the best
configuration for the application. The following 2MB Electrode Fixtures are available:
r Aluminum Electrode Fixture for 75mm-Process Carriers
r Aluminum Electrode Fixture for 136mm-Process Carriers
r Ceramic Electrode Fixture for 136mm-Process Carriers
r Aluminum Electrode Fixture for 160mm-Process Carriers
These fixtures are detailed in 3.5 2MB Electrode Fixturing Assembly Exploded Views.
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FlexTRAK Series 2MB Electrode Fixturing Addendum Introduction
2 © 2023 Nordson Corporation
Figure 1-1 FlexTRAK 2MB Chamber Assembly
Item Description Item Description
1 Chamber Lid Assembly 3 Chamber Base Assembly
2 2MB Fixture Assembly 4 Chamber Lift Assembly
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