N7201A644C.pdf - 第278页
NPM-DX EJM8DC-MB-04T -00 负荷配置图 1 故障排除 4-1 4-1 -1 全体安全盖 料架工作台盖 G105 G103 G106 G104 B1047 S311A S311B B1046 B1446 S312B B1447 S312A AF B1234T B1233T B1232T B1231T AR B1242T B1241T B1240T B1237T BR B1742T B1741T B1740T B173…
4 负荷配置图
NPM-DX EJM8DC-MB-04T-00
负荷配置图 1
故障排除
4-1
4-1-1
全体安全盖
料架工作台盖
G105
G103
G106G104
B1047
S311A
S311B
B1046
B1446
S312B
B1447
S312A
AF
B1234T
B1233T
B1232T
B1231T
AR
B1242T
B1241T
B1240T
B1237T
BR
B1742T
B1741T
B1740T
B1737T
BF
B1734T
B1733T
B1732T
B1731T
AF
B1234
B1233
B1232
B1231
AR
B1242
B1241
B1240
B1237
BR
B1742
B1741
B1740
B1737
BF
B1734
B1733
B1732
B1731
AF：S315A
AR：S316A
BF：S315B
BR：S316B
NPM-DX EJM8DC-MB-04T-00
4-1-2
设备部
M501
M506
M508
M503
M504
M509
M514
M510
M511
M516
M512
B1110A
B1410B
B1510B
R301
B1010A
B113A
B113B
G113A
G111A
G111B
G113B
R4032
R4132
R4432
R4532
R4705
R4701
R4205
R4201
R4700
R4702
G111
G211A
G211B
G112
AF
BF
BR
AR
AF
BF
AR
BR
R4704
R4706
R4200
R4202
R4204
R4206
M502
G113