N7201A644C.pdf - 第279页
NPM-DX EJM8DC-MB-04T -00 4-1 -2 设备部 M501 M506 M508 M503 M504 M509 M514 M510 M511 M516 M512 B1110A B1410B B1510B R301 B1010A B113A B113B G113A G111A G111B G113B R4032 R4132 R4432 R4532 R4705 R4701 R4205 R4201 R4700 R4702 …

NPM-DX EJM8DC-MB-04T-00
负荷配置图 1
故障排除
4-1
4-1-1
全体安全盖
料架工作台盖
G105
G103
G106G104
B1047
S311A
S311B
B1046
B1446
S312B
B1447
S312A
AF
B1234T
B1233T
B1232T
B1231T
AR
B1242T
B1241T
B1240T
B1237T
BR
B1742T
B1741T
B1740T
B1737T
BF
B1734T
B1733T
B1732T
B1731T
AF
B1234
B1233
B1232
B1231
AR
B1242
B1241
B1240
B1237
BR
B1742
B1741
B1740
B1737
BF
B1734
B1733
B1732
B1731
AF:S315A
AR:S316A
BF:S315B
BR:S316B

NPM-DX EJM8DC-MB-04T-00
4-1-2
设备部
M501
M506
M508
M503
M504
M509
M514
M510
M511
M516
M512
B1110A
B1410B
B1510B
R301
B1010A
B113A
B113B
G113A
G111A
G111B
G113B
R4032
R4132
R4432
R4532
R4705
R4701
R4205
R4201
R4700
R4702
G111
G211A
G211B
G112
AF
BF
BR
AR
AF
BF
AR
BR
R4704
R4706
R4200
R4202
R4204
R4206
M502
G113

NPM-DX EJM8DC-MB-04T-00
负荷配置图 2
故障排除
4-1
4-1-3
基板传送带
基板支架
Ast
B1226
B1227
Bst
B1726
B1727
Ast
B1224
B1225
Bst
B1724
B1725
Ast
R4210
R4211
Bst
R4710
R4711
Ast
R4213
R4214
Bst
R4713
R4714
Ast:M610A
Bst:M610B
Ast
B1020
B1021
B1022
B1023
B1027
B1030
B1031
B1032
Bst
B1421
B1422
B1423
B1427
B1430
B1431
B1432
B1433
Ast:M619A
Bst:M619B
Ast:M616A
Bst:M616B
Ast:M617A
Bst:M617B
Ast:B122A
Bst:B122B
Ast:B121RA
Bst:B121RB
Ast:M627A
Bst:M627B
Ast:M625A
Bst:M625B
Ast:M626A
Bst:M626B
Ast:M624A
Bst:M624B
Ast
B123A
B124A
Bst
B123B
B124B
Ast:B125RA
Bst:B125RB
Ast
B1120
B1121
B1122
B1123
B1127
B1130
B1131
B1132
Bst
B1521
B1522
B1523
B1527
B1530
B1531
B1532
B1533
Ast:M629A
Bst:M629B
Ast:M621A
Bst:M621B
Ast:M611A
Bst:M611B
Ast:M615A
Bst:M615B
Ast:B126A
Bst:B126B
Ast:M620A
Bst:M620B
Ast:M614A
Bst:M614B