P-311-003.pdf - 第149页
Key No. P AR T No. P AR T NAME Q’ty REMARKS NOTE 21 1 0900G12R BRACKET 1 1090006133-01 1 222 0900G129 COVER 1 1090006133-022 223 224C0619 CYLINDER 1 1090006133-023 224 225F0345 PIPE_FITTINGS 1 1090006133-024 225 23G10001…
Fig. D1-3
ソレノイドバルブ
Solenoid Valve
223
224
225
232
243
242
271
248
247
233
243
242
260
248
247
261
243
242
240
211
222
227
228
230
281
234
234
237
248
247
262
226
259
See Fig.D1-1
Key No.18
See Fig.D1-1
Key No.12
0912-002
Fig. D1
基板認識部
PEC RECOGNITION SECTION
UNIT-3
Fig. D1
PEC RECG
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
211 0900G12R BRACKET 1 1090006133-011
222 0900G129 COVER 1 1090006133-022
223 224C0619 CYLINDER 1 1090006133-023
224 225F0345 PIPE_FITTINGS 1 1090006133-024
225 23G10001 SENSOR_PHOTO 1 1090006133-025
226 226J2576 CABLE_VEYOR 1 1090006133-026
227 0900611J ASSY_VALVE 1 1090006133-027
228 225B0001 AIR_LINE_EQPT 1 1090006133-028
230 0900G109 BRACKET 1 1090006133-030
232 0900G11N AIR_LINE_EQPT 2 1090006133-032
233 221AA341 ROHS_HEX-SCT 2 1090006133-033
234 225F0377 PIPE_FITTINGS 4 1090006133-034
237 225F0307 PIPE_FITTINGS 2 1090006133-037
240 221AA015 ROHS_HEX-SCT 2 1090006133-040
242 221HA004 WASHER 6 1090006133-042
243 221HA104 WASHER 6 1090006133-043
247 221HA003 WASHER 6 1090006133-047
248 221HA103 WASHER 6 1090006133-048
259 221DA216 MACHINE SCREW 2 1090006133-059
260 221AA022 ROHS_HEX-SCT 2 1090006133-060
261 221DA012 MACHINE_SCREW 2 1090006133-061
262 1000A300 BOLT_HEX-SCT 2 1090006133-062
271 221AA018 ROHS_HEX-SCT 2 1090006133-071
281 0900611P VACCUM_UNIT 1 1090006133-081
Fig. D1
1102-003
Fig. D1-3
UNIT-3
Fig. D1
PEC RECG
SIGMA-P4
Fig. D1-4
基板検出部
PEC Detection Section
Key No.12
See Fig.D1-1
C
C
A
A
3A1
3A1
383
396
389
384
391
396
3A1
3A1
391
389
395
394
393
384
390
396
396
391
384
389
389
384
391
390
3A3
371
343
374
371
343
374
398
399
3A0
398
399
3A0
341
342
343
398
399
3A0
3A4
3A4
3A3
381
392
381
385
398
399
3A0
398
399
3A0
386
381
3A3
388
3A4
3A4
381
3A3
385
1102-003
Fig. D1
基板認識部
PEC RECOGNITION SECTION
UNIT-3
Fig. D1
PEC RECG