P-311-003.pdf - 第81页

Key No. P AR T No. P AR T NAME Q’ty REMARKS NOTE 904 223B0432 BALL_SCREW 1 3090004001-004 905 216K0156 SET COLLAR 1 3090004001-005 906 222F0026 BEARING_UNIT 1 3090004001-006 907 223C0260 COUPLING 1 3090004001-007 908 090…

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Fig. B1-10
X
軸モータ、
Z
軸センサ
X Axis Motor, Z Axis Sensor
925
926
927
928
931
930
929
931
930
929
931
930
929
931
930
929
932
930
929
932
930
929
932
930
929
933
930
929
924
924
927
924
924
904
905
908
907
909
910
911
912
917
916
913
906
See Fig. B1-2
Key No.118
0912-002
Fig. B1
テーブル、基板チャック部
TABLE, PCB CHUCK SECTION
UNIT-1
Fig. B1
TABLE
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
904 223B0432 BALL_SCREW 1 3090004001-004
905 216K0156 SET COLLAR 1 3090004001-005
906 222F0026 BEARING_UNIT 1 3090004001-006
907 223C0260 COUPLING 1 3090004001-007
908 0900403C ASSY_MOTOR 1 3090004001-008
909 211FD325 BRACKET 1 3090004001-009
910 221AA019 ROHS_HEX-SCT 4 3090004001-010
911 221HA004 WASHER 4 3090004001-011
912 221HA104 WASHER 4 3090004001-012
913 221AA020 ROHS_HEX-SCT 4 3090004001-013
916 221BA030 ROHS_BOLT_HEX 1 3090004001-016
917 221FA011 NUT_HEX 1 3090004001-017
924 23G10001 SENSOR_PHOTO 5 3090004007-004
925 0900E055 BRACKET 1 3090004007-005
926 211DA761 PLATE 1 3090004007-006
927 211DA762 PLATE 2 3090004007-007
928 211DE761 PLATE 1 3090004007-008
929 221AA006 ROHS_HEX-SCT 8 3090004007-009
930 221HA003 WASHER 16 3090004007-010
931 221HA103 WASHER 16 3090004007-011
932 221DA012 MACHINE_SCREW 6 3090004007-012
933 221DA016 MACHINE SCREW 2 3090004007-013
Fig. B1
1102-003
Fig. B1-10
UNIT-1
Fig. B1
TABLE
SIGMA-P4
Fig. B1-11
ケーブル
Cable
A11
A12
A13
B212
B173
B4C
B49
B49T
B233
B4D
B171
B172
B231
B232
B2 1 1
B213
M21
M17
M23
M25
M51
B251
M49
X251
X235
X176
X233
X1498
M17B
M23E
M23
M25
M23B
M17
X2048
X1510
B48
A02
A03
A06
A08
A09
A07
A10
X211
X210
X1215
X171
X104C
A11
A12
A13
A11
A12
A13
A11
A12
A13
A11
A12
A14
A11
A12
A13
A11
A12
A13
A13
A14
A15
A13
A11
A12
A13
A11
A12
A13
A01
A04
A11
A12
A13
A13
A13
A11
A12
A13
A13
A13
A05
A11
A12
A13
A11
A12
A13
0912-002
Fig. B1
テーブル、基板チャック部
TABLE, PCB CHUCK SECTION
UNIT-1
Fig. B1
TABLE