P-311-003.pdf - 第150页
Fig. D1-4 基板検出部 PEC Detection Section Key No.12 See Fig.D1-1 C C A A 3A1 3A1 383 396 389 384 391 396 3A1 3A1 391 389 395 394 393 384 390 396 396 391 384 389 389 384 391 390 3A3 371 343 374 371 343 374 398 399 3A0 398 399…
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
211 0900G12R BRACKET 1 1090006133-011
222 0900G129 COVER 1 1090006133-022
223 224C0619 CYLINDER 1 1090006133-023
224 225F0345 PIPE_FITTINGS 1 1090006133-024
225 23G10001 SENSOR_PHOTO 1 1090006133-025
226 226J2576 CABLE_VEYOR 1 1090006133-026
227 0900611J ASSY_VALVE 1 1090006133-027
228 225B0001 AIR_LINE_EQPT 1 1090006133-028
230 0900G109 BRACKET 1 1090006133-030
232 0900G11N AIR_LINE_EQPT 2 1090006133-032
233 221AA341 ROHS_HEX-SCT 2 1090006133-033
234 225F0377 PIPE_FITTINGS 4 1090006133-034
237 225F0307 PIPE_FITTINGS 2 1090006133-037
240 221AA015 ROHS_HEX-SCT 2 1090006133-040
242 221HA004 WASHER 6 1090006133-042
243 221HA104 WASHER 6 1090006133-043
247 221HA003 WASHER 6 1090006133-047
248 221HA103 WASHER 6 1090006133-048
259 221DA216 MACHINE SCREW 2 1090006133-059
260 221AA022 ROHS_HEX-SCT 2 1090006133-060
261 221DA012 MACHINE_SCREW 2 1090006133-061
262 1000A300 BOLT_HEX-SCT 2 1090006133-062
271 221AA018 ROHS_HEX-SCT 2 1090006133-071
281 0900611P VACCUM_UNIT 1 1090006133-081
Fig. D1
1102-003
Fig. D1-3
UNIT-3
Fig. D1
PEC RECG
SIGMA-P4
Fig. D1-4
基板検出部
PEC Detection Section
Key No.12
See Fig.D1-1
C
C
A
A
3A1
3A1
383
396
389
384
391
396
3A1
3A1
391
389
395
394
393
384
390
396
396
391
384
389
389
384
391
390
3A3
371
343
374
371
343
374
398
399
3A0
398
399
3A0
341
342
343
398
399
3A0
3A4
3A4
3A3
381
392
381
385
398
399
3A0
398
399
3A0
386
381
3A3
388
3A4
3A4
381
3A3
385
1102-003
Fig. D1
基板認識部
PEC RECOGNITION SECTION
UNIT-3
Fig. D1
PEC RECG
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
341 221AA020 ROHS_HEX-SCT 8 1090006133-041
342 221HA004 WASHER 10 1090006133-042
343 221HA104 WASHER 8 1090006133-043
371 221AA018 ROHS_HEX-SCT 2 1090006133-071
374 221HA302 ROHS_WASHER 2 1090006133-074
381 222D0309 BEARING_RADIAL 4 209000610K-001
383 211DD858 PLATE 1 209000610K-003
384 216S3213 LEVER 4 209000610K-004
385 211FD393 BRACKET 2 209000610K-005
386 0900G12B PLATE 1 209000610K-006
388 211FD392 BRACKET 1 209000610K-008
389 221E0450 BOLT 4 209000610K-009
390 0900G12N SHAFT 2 209000610K-010
391 0900G125 SPRING_TENSION 4 209000610K-011
392 211FD391 BRACKET 1 209000610K-012
393 0900G12X BLOCK 1 209000610K-013
394 222D0211 BEARING_RADIAL 1 209000610K-014
395 216E1756 PIN_LOCATE 1 209000610K-015
396 222J0203 BUSH_BALL 4 209000610K-016
398 221AA016 ROHS_HEX-SCT 9 209000610K-018
399 221HA004 WASHER 9 209000610K-019
3A0 221HA104 WASHER 9 209000610K-020
3A1 221FA007 NUT_HEX 4 209000610K-021
3A3 221AA010 ROHS_HEX-SCT 4 209000610K-023
3A4 221FA005 NUT_HEX 4 209000610K-024
Fig. D1
1102-003
Fig. D1-4
UNIT-3
Fig. D1
PEC RECG
SIGMA-P4