P-311-003.pdf - 第79页
Key No. P AR T No. P AR T NAME Q’ty REMARKS NOTE 804 226J0882 SCREW_PLUGS 2 1090004002-004 805 225F0345 PIPE_FITTINGS 1 1090004002-005 806 0900E04R BASE 1 1090004002-006 807 21 1G5724 BLOCK 1 1090004002-007 808 0900E01Z …
Fig. B1-9
バックアップベース
Back Up Base
836
818
817
818
817
804 813
812
118
813
812
118
808
819
814
815
821
821
805
820
807
832
831
833
837
837
834
836
837
834
837
833
810
810
809
806
1102-003
Fig. B1
テーブル、基板チャック部
TABLE, PCB CHUCK SECTION
UNIT-1
Fig. B1
TABLE
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
804 226J0882 SCREW_PLUGS 2 1090004002-004
805 225F0345 PIPE_FITTINGS 1 1090004002-005
806 0900E04R BASE 1 1090004002-006
807 211G5724 BLOCK 1 1090004002-007
808 0900E01Z SENSOR_DOG 1 1090004002-008
809 211DD917 PLATE 1 1090004002-009
810 216E1739 PIN_LOCATE 4 1090004002-010
811 221HA004 WASHER 4 1090004002-011
812 221HA104 WASHER 4 1090004002-012
813 221AA017 ROHS_HEX-SCT 4 1090004002-013
814 221AA020 ROHS_HEX-SCT 12 1090004002-014
815 221AA021 ROHS_HEX-SCT 3 1090004002-015
817 221BA022 BOLT_HEX 4 1090004002-017
818 221FA009 NUT_HEX 4 1090004002-018
819 221AA060 BOLT_HEX-SCT 2 1090004002-019
820 222K0234 SHAFT_LINEAR 1 1090004002-020
821 222K0233 SHAFT_LINEAR 2 1090004002-021
831 0900E01H PLATE 1 2090004047-001
832 0900E054 PLATE 1 2090004047-002
833 0900E028 COVER 2 2090004047-003
834 0900E029 COVER 2 2090004047-004
836 0900E02B COVER 2 2090004047-006
837 221AA006 ROHS_HEX-SCT 8 2090004047-007
Fig. B1
1102-003
Fig. B1-9
UNIT-1
Fig. B1
TABLE
SIGMA-P4
Fig. B1-10
X
軸モータ、
Z
軸センサ
X Axis Motor, Z Axis Sensor
925
926
927
928
931
930
929
931
930
929
931
930
929
931
930
929
932
930
929
932
930
929
932
930
929
933
930
929
924
924
927
924
924
904
905
908
907
909
910
911
912
917
916
913
906
See Fig. B1-2
Key No.118
0912-002
Fig. B1
テーブル、基板チャック部
TABLE, PCB CHUCK SECTION
UNIT-1
Fig. B1
TABLE