TRS Advanced WB Intel Issue 02.pdf - 第99页

Issue 2, Nov 14 TRS Advanced Maintenance 99 Objective 29: Check / Calibrate “TRP Home Sensor” and “TRP above Rails Sensor” using the Technical Reference Manual TRS Chapter, Adjustment and Setting Section.

TRS Advanced Maintenance

Issue 2, Nov 14

Objective 28: Co-Planarity

Use the ASM TRS Co-Planarity Procedures Technical Bulleting 384 (TB384) to complete the

following objectives

1. Complete the Chase to Rail Cap co-planarity procedure

2. Complete the tooling co-planarity qualification baseline check.

3. Complete the Active Surround to Tooling co-planarity check

QUESTIONS:

What is the tolerance of the Chase to Rail Cap co-planarity?

What is the tolerance of the Tooling co-planarity check?

What is the next step if the tooling co-planarity is out of tolerance?

What proportion of the substrate should be above the Active Surround?

What are the next steps if the substrate is found to be either below the Active Surround or out

of tolerance above the Active Surround?

Issue 2, Nov 14

TRS Advanced Maintenance

Objective 29: Check / Calibrate “TRP Home Sensor” and “TRP above Rails Sensor”

using the Technical Reference Manual TRS Chapter, Adjustment and Setting Section.

TRS Advanced Maintenance

100

Issue 2, Nov 14

Objective 30: Check/Set Rising Table Home Position using the Technical Reference

Manual, Rising Table Chapter, Adjustment and Setting Section.

The Rising Table Home position is measured from the _________________________ to the

_________________________________.

The measurement should be_______________________________.

This is adjusted by_______________________________________.

Use the Technical Reference Manual to complete the Rising Table Home Position Calibration

on the machine: