P-0310-004(2_2).pdf - 第16页
Fig. I1-3 エア配管 Air Piping 1007-001 From Main Body Stocker Up/Down 201 See Fig. I1-2 Key No.121 See Fig. I1-2 Key No.125 Y0937 B0920 B0918 B0922 Fig. I1 中異形ノズルストッカ部 MIDDLE SIZE ODD-SHAPED NOZZLE SECTION UNIT -8 Fig. I1 ST…
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
103 09198209 ASSY_VALVE 1 1091908206-003
104 221AA033 ROHS_HEX-SCT 1
M5L25 1091908206-004
105 221AA031 ROHS_HEX-SCT 1
M5L16 1091908206-005
111 212A2087 GUIDE 1
1091908204-001
112 216S2677 LEVER 2
1091908204-002
113 216D0463 PIN_HINGE 1
1091908204-003
114 216D0464 PIN_HINGE 1
1091908204-004
115 211F8213 BRACKET 1
1091908204-005
116 211G3505 BLOCK 1
1091908204-006
117 216D0441 PIN_HINGE 1
1091908204-007
118 216S2914 LEVER 1
1091908204-008
119 211D9825 PLATE 1
1091908204-009
120 211F9410 BRACKET 1
1091908204-010
121 09198208 ASSY_SENSOR 1
1091908204-011
122 222A0129 BUSH_BEARING 2
1091908204-012
123 222D0131 BEARING_RADIAL 2
1091908204-013
124 222D0308 BEARING_RADIAL 1
1091908204-014
125 224C0535 CYLINDER 1
1091908204-015
126 222A0151 BUSH_BEARING 2
1091908204-016
127 221KA002 ROHS_RING 4
E RING 2 1091908204-017
128 225F0261 PIPE_FITTINGS 1
1091908204-018
129 222N0019 SPRING_TENSION 1
1091908204-019
130 222M0657 SPRING_COMP 1
1091908204-020
133 221HA001 WASHER 6
SW2 1091908204-023
134 221HA101 WASHER 2
FW2 1091908204-024
135 221FA005 NUT_HEX 1
M3 1091908204-025
136 221BA004 ROHS_BOLT_HEX 1
BOLT_HEX M3L25 1091908204-026
137 221AA013 ROHS_HEX-SCT 2
M3L30 1091908204-027
138 221AA003 ROHS_HEX-SCT 2
M2.5L12 1091908204-028
139 221HA002 WASHER 2
SW2.5 1091908204-029
140 221HA102 WASHER 2
FW2.5 1091908204-030
141 221CA026 SET_SCREW 1
SET M3L3 1091908204-031
142 221HA201 WASHER 6
FWS2 1091908204-032
143 221DA003 MACHINE_SCREW 3
PAN M2L8 1091908204-033
144 221FA001 NUT_HEX 1
M2 1091908204-034
145 221AA001 ROHS_HEX-SCT 4
M2L6 1091908204-035
146 221FA003 NUT_HEX 1
M2.5 1091908204-036
147 221AA005 ROHS_HEX-SCT 2
M3L6 1091908204-037
148 221AA008 ROHS_HEX-SCT 2
M3L12 1091908204-038
Fig. I1
1104-002
Fig. I1-2
SIGMA-G5SA
SIGMA-G5SB
SIGMA-G5SC
SIGMA-G5SD
UNIT-8
Fig. I1
STOCKER
Fig. I1-3
エア配管
Air Piping
1007-001
From Main Body
Stocker Up/Down
201
See Fig. I1-2
Key No.121
See Fig. I1-2
Key No.125
Y0937
B0920
B0918
B0922
Fig. I1
中異形ノズルストッカ部
MIDDLE SIZE ODD-SHAPED NOZZLE SECTION
UNIT-8
Fig. I1
STOCKER
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
201 0919I00K TUBE D4 1 2091908207-001
Fig. I1
1007-001
Fig. I1-3
SIGMA-G5SA
SIGMA-G5SB
SIGMA-G5SC
SIGMA-G5SD
UNIT-8
Fig. I1
STOCKER