TX_V2_年保养英文.pdf - 第41页

11 WF 4 TX-Series V2 Clean the fiducial bars (TX V2 micron and HD only) 5 min 1 / 1 C A U T I O N !  R e f e r t o s a f e t y i n s t r u c t i o n s i n u s e r m a n u a l b e f o r e c o m m e n c i n g M a i n t e …

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11 WF 4 TX-Series V2 Clean the fiducial bars (TX V2 micron and HD only) 5 min 1 / 1
CAUTION! Refer to safety instructions in user manual before commencing Maintenance
Machine Status OFF Transport Empty
NOTICE! ESD guidelines are to be followed Tool: Wear Part: Consumables:
C3
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1 Carefully clean the glass fiducial bars at all
locations.
2 Carefully clean the calibration boards at all
locations.
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