YSH20_mpl_je.pdf - 第6页
14. W afer Ejector Section 15. W afer T able-axis Section 16. W afer Attachment Section 17. Waf er P alle t Se ction 14-1. Cable / Valve 14-2. Ejector Housing / Pin 15-1. Sensor / Motor / Stay 16-1. Attachment Assy 17-1.…
6. Conveyor Unit Section
7 . Force Control Unit Section
8. FDR Section
6-4. PCB Sensor Set (KEY) 7-1. Force Control Unit 8-1. Set Up ST on MC 8-2. FDR Power ST 8-3. FDR Stand Type144
9.
Controller Section
10. Exterior, etc Section 11 .Wafer LZ-axis Section
9-1. Control Box 10-1. Exterior, etc.
10-2. Key Board & Mouse /
LCD Stay Assy
11-1. Carrige Assy 11-2. Foot / Valve
11 .Wafer LZ-axis Section
12 .Wafer LCY-axis Section
13 .Wafer Head Section
11-3. Carrige Sensor / Exterior
11-4. Door / Guide 11-5. Stopper 12-1. LCY-axis 13-1. Nozzle Selection
Contents
2
3
4
6
8
10
12
16
19 21
23
25
1.7
12U1
D
1.7
D
2.7
D
2.7
D
2.7
D
2.7
D
1.7
D
1.7
D
1.7
D
1.7
D
1.7
D
12U1 12U1
12U1
12U1 12U1 12U1
12C 12C 12C 12C
1 5 7 9 11 13
15 17 20 22 24
NOZZLE 07 ASSY NOZZLE 10 ASSY NOZZLE 12 ASSY NOZZLE 15 ASSY NOZZLE 20 ASSY NOZZLE 38 ASSY
NOZZLE 50 ASSY NOZZLE 71 ASSY NOZZLE 86 ASSY NOZZLE 112 ASSY NOZZLE 120 ASSY
14
2
4
2
4
2
4
2
4
2
4
2
4
18
4
18
4
18
4
18
4
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14. Wafer Ejector Section
15. Wafer Table-axis Section
16. Wafer Attachment Section
17. Wafer Pallet Section
14-1. Cable / Valve 14-2. Ejector Housing / Pin 15-1. Sensor / Motor / Stay 16-1. Attachment Assy
17-1. Pallet Assy (8/6inch/Rack)
18. Tools Section
18-1. Tools
Contents
1 2 3 4 5
6 7 8 9 10
11 12 13 14 15
16 17 18 19
KV8-M8860-00 KV8-M8883-A0 KV7-M8880-20 KGA-M3801-00 KGA-M3803-00
KV8-M8881-A0 KU4-M8590-00 KV8-M8870-00
K48-M3852-01 K48-M3857-00 K48-M3854-00 KM8-M34E0-B1 KJ3-MY010-00
KJ3-M34E0-XX KV7-M3823-00 KV7-M8890-00KJ3-MJA00-00
KVA-M3802-00
3 / 3
KJX-1107
1
25
23
24
22
30
32
28
31
29
27
26
11
12
11
14
3
11
5
13
7
6
8
16
15
17
19
18
21
20
8
2
9
10
11
4
33
34
35
1
1
Sub Assy
Base