YSH20_mpl_je.pdf - 第66页
KJX-101 1 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. P…
KJX-1011
2
3
4
6
8
10
12
16
19 21
23
25
1.7
12U1
D
1.7
D
2.7
D
2.7
D
2.7
D
2.7
D
1.7
D
1.7
D
1.7
D
1.7
D
1.7
D
12U1 12U1
12U1
12U1 12U1 12U1
12C 12C 12C 12C
1 5 7 9 11 13
15 17 20 22 24
NOZZLE 07 ASSY NOZZLE 10 ASSY NOZZLE 12 ASSY NOZZLE 15 ASSY NOZZLE 20 ASSY NOZZLE 38 ASSY
NOZZLE 50 ASSY NOZZLE 71 ASSY NOZZLE 86 ASSY NOZZLE 112 ASSY NOZZLE 120 ASSY
14
2
4
2
4
2
4
2
4
2
4
2
4
18
4
18
4
18
4
18
4
13
1
Nozzle Selection
Wafer Head
KJX-1011
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KGP-M71A0-A0X NOZZLE 07 ASSY
1
D=0.76mm
E
39
2
KGP-M71A1-00X SHANK 12U1
1
/
40
3
KM0-M71BC-03X RUBBER TIPS:R1A-030
1 E
41
4
92A08-02303 SET SCREW
1
M2X3
/
42
5
KGP-M71A0-B0X NOZZLE 10 ASSY
1
D=1.02mm
E
43
6
KM0-M71BC-04X RUBBER TIPS:R1A-040
1 E
44
7
KGP-M71A0-C0X NOZZLE 12 ASSY
1
D=1.27mm
E
45
8
KM0-M71BC-05X RUBBER TIPS:R1A-050
1
E
46
9
KGP-M71A0-D0X NOZZLE 15 ASSY
1
D=1.52mm
E
47
10
KM0-M71BC-06X RUBBER TIPS:R1-060
1 E
48
11
KGP-M71A0-E0X NOZZLE 20 ASSY
1
D=2.03mm
E
49
12
KM0-M71BC-08X RUBBER TIPS:R1-080
1 E
50
13
KGP-M71A0-F0X NOZZLE 38 ASSY
1
D=3.81mm
E
51
14
KM0-M71BC-15X RUBBER TIPS:R1-150
1 E
52
15
KGP-M71A0-G0X NOZZLE 50 ASSY
1
D=5.08mm
E
53
16
KM0-M71BC-20X RUBBER TIPS:R1-200
1 E
54
17
KGP-M71A0-H0X NOZZLE71 ASSY
1
D=7.11mm
E
55
18
KGP-M71A1-10X SHANK 12C
1
E
56
19
KM0-M71BC-28X RUBBER TIPS:RI-280
1
E
57
20
KGP-M71A0-J0X NOZZLE 86 ASSY
1
D=8.64mm
E
58
21
KM0-M71BC-34X RUBBER TIPS:R1-340
1 E
59
22
KGP-M71A0-K0X NOZZLE112 ASSY
1
D=11.18mm
E
60
23
KM0-M71BC-44X RUBBER TIPS:R1-440
1 E
61
24
KGP-M71A0-L0X NOZZLE 120 ASSY
1
D=12.00mm
E
62
25
KM0-M71BC-48X RUBBER TIPS:R1-480
1 E
63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
13
1
Nozzle Selection
Wafer Head
KJX-1011
16
1
4
3
23
24
2
21
21
9
14
19
11
12
10
13
13
17
22
20
8
7
6
16
15
5
23
24
15
18
14
1
Cable / Valve
Wafer Ejector