YSH20_mpl_je.pdf - 第74页
KJX-101 1 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. P…
KJX-1011
29
29
23
13
12
29
29
29
20
19
21
22
29
26
26
15
14
16
26
29
29
29
29
29
29
29
10
11
18
17
6
28
28
28
29
5
4
27
9
12 in 8 in 6 in
24 25
29
29
29
8
7
3
1
1
28
1
28
1
26
28
1
1
6
6
6
6
28
1
1
28
1
29
6
5
4
27
5
4
27
16
26
2
28
1
28
1
28
1
16
1
Attachment Assy
Wafer Attachment
KJX-1011
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M3B1C-A0 CLAMP,HNS
38 /
Í
39
2
KJY-M3B1E-A0
RAIL L,ATTACH12
1
/
Í
40
3
KJY-M3B1F-A0 RAIL R,ATTACH12
1 /
Í
41
4
KJY-M652M-00 SENSOR PLT STG ASSY
3 B
Í
42
5
KJY-M923G-00 BRACKET,AMP
3 /
Í
43
6
KJY-M3B1J-A0 GUIDE R,12
6 /
Í
44
7
KJY-M3B1L-A0 GUIDE FR,12
1 /
Í
45
8
KJY-M3B1K-A0 GUIDE FL,12
1 /
Í
46
9
KJY-M3B21-A0 RING 12
1 /
47
10
KJY-M3B1E-B0 RAIL L,ATTACH8
1 /
Í
48
11
KJY-M3B1F-B0 RAIL R,ATTACH8
1 /
Í
49
12
KJY-M3B1K-B0 GUIDE FL,8
1 /
Í
50
13
KJY-M3B1L-B0 GUIDE FR,8
1 /
Í
51
14
KJY-M3B22-B0 RING 8,ADAPTER
1 /
52
15
KJY-M3B21-B0 RING 8
1 /
53
16
KJY-M3B23-B0 DOG 8,SENSOR
1 /
Í
54
17
KJY-M3B1F-C0 RAIL R,ATT6
1 /
Í
55
18
KJY-M3B1E-C0 RAIL L,ATT6
1 /
Í
56
19
KJY-M3B1K-C0 GUIDE FL,6
1 /
Í
57
20
KJY-M3B1L-C0 GUIDE FR,6
1
/
Í
58
21
KJY-M3B21-C0
RING 6
1 /
59
22
KJY-M3B22-C0 RING 6,ADAPTER
1 /
60
23
KJY-M3B00-A0 ATTACHMENT.12IN
1 /
61
24
KJY-M3B00-B0 ATTACHMENT.8IN
1 /
62
25
KJY-M3B00-C0 ATTACHMENT.6IN
6 /
63
26
91312-03012 BOLT,HEX.SOCKET HEAD
20
M3X12
64
27
91312-03004 BOLT HEX.SOCKET HEAD
6
M3X4
65
28
98502-03003 SCREW,PAN HEAD
38 66
29
98702-03008 SCREW FLAT HEAD
57 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
16
1
Attachment Assy
Wafer Attachment
KJX-1107
2
3
4
4
3
4
1
9
33
33
33
32
32
5
6
7
8
10
18
18
23
11
23
25
25
25
25
25
20
25
31
31
24
29
13
13
13
13
12
12
34
34
15
26
26
25
30
30
27
27
27
17
14
27
8 inch 6 inch
19
16
33
33
33
32
32
4
21
31
35
28
36
37
28
17
1
Pallet Assy (8/6inch/Rack)
Wafer Pallet