YSH20_mpl_je.pdf - 第70页
KJX-1 107 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. P…
KJX-1107
1 4 4
7
13 19
2
3
5
6
5
6
8
9
10
11
12
14
15
16
17
20
18
14
2
Ejector Housing / Pin
Wafer Ejector
KJX-1107
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M97A0-00 HOUSING 1 ASSY
1 /
39
2
KJY-M97X0-01
EJECTOR,HOUSING
1
/
40
3
92A08-03303 SET SCREW M3X3
2 /
41
4
KJY-M97A0-10 HOUSING 2 ASSY
1 /
42
5
KJY-M97X0-11 EJECTOR,HOUSING
1 /
43
6
92A08-03303 SET SCREW M3X3
2 /
44
7
KW6-M97B0-00 PIN 03 ASSY
1 /
45
8
KW6-M97B1-00 PIN 03, EJECTOR
1 E
46
9
KW6-M97B2-00 HOLDER 03, EJECTOR
1 /
47
10
KW6-M97B3-00 HOLDER A
1 /
48
11
92A08-03303 SET SCREW M3X3
1 /
49
12
92A08-02303 SET SCREW M2X3
1 /
50
13
KW6-M97B0-10 PIN 07 ASSY
1 /
51
14
KW6-M97B1-10 PIN 07, EJECTOR
1 E
52
15
KW6-M97B2-10 HOLDER 07, EJECTOR
1 /
53
16
KW6-M97B3-00 HOLDER A
1 /
54
17
92A08-03303 SET SCREW M3X3
1 /
55
18
92A08-02303 SET SCREW M2X3
1 /
56
19
KW6-M97B0-20 PIN ASSY 3
1 E
57
20
92A08-03303 SET SCREW M3X3
2
/
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
14
2
Ejector Housing / Pin
Wafer Ejector
KJX-1107
31
31
7
1
2
33
16
13
12
34
14
37
37
32
25
24
4
3
6
5
36
38
30
30
23
21
22
39
39
17
29
35
20
19
36
31
27
26
6
34
14
11
9
8
30
30
10
15
40
41
39
28
18
15
1
Sensor / Motor / Stay
Wafer Table-axis