YSH20_mpl_je.pdf - 第72页

KJX-1 107 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. P…

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KJX-1107
31
31
7
1
2
33
16
13
12
34
14
37
37
32
25
24
4
3
6
5
36
38
30
30
23
21
22
39
39
17
29
35
20
19
36
31
27
26
6
34
14
11
9
8
30
30
10
15
40
41
39
28
18
15
1
Sensor / Motor / Stay
Wafer Table-axis
KJX-1107
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KM0-M2220-00 COUPLING,X-AXIS
1 B
Í
39
90990-01J039 BOLT,HEX.SOCKET HEAD
6
2
90K63-511415
AC SERVO MOTOR
1
B
Í
40
KJY-M8601-00 VALVE
1
SPARE
B
3
KJY-M652R-10 SENSOR LY OT ASSY
1 B
Í
41
91312-03030 BOLT HEX.SOCKET HEAD
4
4
KJY-M652E-20 SENSOR LY ORG ASSY
1 B
Í
42
5
KJY-M9203-00 BRACKET,SENSOR ORG
1 /
Í
43
6
KJY-M9209-00 DOG
2 /
Í
44
7
KJY-M9202-00 SENSOR,HNS.
1
/
Í
45
8
KJY-M92JV-00 BRACKET,CONNECTOR
1
/
Í
46
9
KJY-M92JX-00 COVER 2,CONNECTOR
1 /
47
10
KJY-M92JW-00
COVER 1,CONNECTOR
1 /
48
11
KJY-M92EV-00 BRACKET,AMP
1 /
Í
49
12
KJY-M652L-00 SENSOR PLT STG2 ASSY
1
with ber
B
Í
50
13
KJY-M652M-20 SENSOR EXP TYP ASSY
1
with ber
B
Í
51
14
KJY-M923G-00 BRACKET,AMP
2 /
Í
52
15
KJY-M92VL-A0 VALVE ASSY
1 B
53
16
KJY-M92T0-00 LY DUCT 3ASSY.
1 /
Í
54
17
KJY-M92KA-00 DUCT,HNS
1 /
Í
55
18
KJY-M92KB-00 PANEL 1,LY DUCT3
1 /
Í
56
19
KJY-M92KC-00 PANEL 2,LY DUCT3
1 /
Í
57
20
KJY-M92KD-00 SEPARATOR
1 /
Í
58
21
KJY-M92KF-00 COVER,LY DUCT3
1 /
59
22
KJY-M92KE-00 POST,LY DUCT 3
2 /
Í
60
23
KJY-M92KJ-00 HNS COVER,LY DUCT 3
1 /
Í
61
24
KJY-M92G0-00 Y GREASE PIPE ASSY.
1 /
Í
62
25
KJY-M92G1-00 MANIFOLD,GREASE
1 /
Í
63
26
KJY-M921H-00 GREASE NIPPLE
1 /
Í
64
27
KHY-M266E-00 JOINT
1 /
Í
65
28
KJY-M92KK-00 HNS COVER,LY DUCT 3
1 /
66
29
91312-03004 BOLT HEX.SOCKET HEAD
2
M3X4
67
30
91312-03005 BOLT HEX.SOCKET HEAD
8
M3X5
68
31
91312-04010 BOLT HEX.SOCKET HEAD
14
M4X10
69
32
91312-04030 BOLT HEX.SOCKET HEAD
2
M4X30
70
33
91312-06020 BOLT HEX.SOCKET HEAD
8
M6X20
71
34
98902-03004 SCREW BINDING HEAD
4 72
35
98902-03005 SCREW BINDING HEAD
3 73
36
98902-03010 SCREW BINDING HEAD
2 74
37
90990-11J001 SCREW PAN HEAD W/W
4 75
38
98702-04010 SCREW FLAT HEAD
6 76
15
1
Sensor / Motor / Stay
Wafer Table-axis
KJX-1011
29
29
23
13
12
29
29
29
20
19
21
22
29
26
26
15
14
16
26
29
29
29
29
29
29
29
10
11
18
17
6
28
28
28
29
5
4
27
9
12 in 8 in 6 in
24 25
29
29
29
8
7
3
1
1
28
1
28
1
26
28
1
1
6
6
6
6
28
1
1
28
1
29
6
5
4
27
5
4
27
16
26
2
28
1
28
1
28
1
16
1
Attachment Assy
Wafer Attachment