YSH20_mpl_je.pdf - 第71页
KJX-1 107 31 31 7 1 2 33 16 13 12 34 14 37 37 32 25 24 4 3 6 5 36 38 30 30 23 21 22 39 39 17 29 35 20 19 36 31 27 26 6 34 14 1 1 9 8 30 30 10 15 40 41 39 28 18 15 1 Sensor / Motor / Stay Wafer Table-axis
KJX-1107
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M97A0-00 HOUSING 1 ASSY
1 /
39
2
KJY-M97X0-01
EJECTOR,HOUSING
1
/
40
3
92A08-03303 SET SCREW M3X3
2 /
41
4
KJY-M97A0-10 HOUSING 2 ASSY
1 /
42
5
KJY-M97X0-11 EJECTOR,HOUSING
1 /
43
6
92A08-03303 SET SCREW M3X3
2 /
44
7
KW6-M97B0-00 PIN 03 ASSY
1 /
45
8
KW6-M97B1-00 PIN 03, EJECTOR
1 E
46
9
KW6-M97B2-00 HOLDER 03, EJECTOR
1 /
47
10
KW6-M97B3-00 HOLDER A
1 /
48
11
92A08-03303 SET SCREW M3X3
1 /
49
12
92A08-02303 SET SCREW M2X3
1 /
50
13
KW6-M97B0-10 PIN 07 ASSY
1 /
51
14
KW6-M97B1-10 PIN 07, EJECTOR
1 E
52
15
KW6-M97B2-10 HOLDER 07, EJECTOR
1 /
53
16
KW6-M97B3-00 HOLDER A
1 /
54
17
92A08-03303 SET SCREW M3X3
1 /
55
18
92A08-02303 SET SCREW M2X3
1 /
56
19
KW6-M97B0-20 PIN ASSY 3
1 E
57
20
92A08-03303 SET SCREW M3X3
2
/
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
14
2
Ejector Housing / Pin
Wafer Ejector
KJX-1107
31
31
7
1
2
33
16
13
12
34
14
37
37
32
25
24
4
3
6
5
36
38
30
30
23
21
22
39
39
17
29
35
20
19
36
31
27
26
6
34
14
11
9
8
30
30
10
15
40
41
39
28
18
15
1
Sensor / Motor / Stay
Wafer Table-axis
KJX-1107
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KM0-M2220-00 COUPLING,X-AXIS
1 B
Í
39
90990-01J039 BOLT,HEX.SOCKET HEAD
6
2
90K63-511415
AC SERVO MOTOR
1
B
Í
40
KJY-M8601-00 VALVE
1
SPARE
B
3
KJY-M652R-10 SENSOR LY OT ASSY
1 B
Í
41
91312-03030 BOLT HEX.SOCKET HEAD
4
4
KJY-M652E-20 SENSOR LY ORG ASSY
1 B
Í
42
5
KJY-M9203-00 BRACKET,SENSOR ORG
1 /
Í
43
6
KJY-M9209-00 DOG
2 /
Í
44
7
KJY-M9202-00 SENSOR,HNS.
1
/
Í
45
8
KJY-M92JV-00 BRACKET,CONNECTOR
1
/
Í
46
9
KJY-M92JX-00 COVER 2,CONNECTOR
1 /
47
10
KJY-M92JW-00
COVER 1,CONNECTOR
1 /
48
11
KJY-M92EV-00 BRACKET,AMP
1 /
Í
49
12
KJY-M652L-00 SENSOR PLT STG2 ASSY
1
with ber
B
Í
50
13
KJY-M652M-20 SENSOR EXP TYP ASSY
1
with ber
B
Í
51
14
KJY-M923G-00 BRACKET,AMP
2 /
Í
52
15
KJY-M92VL-A0 VALVE ASSY
1 B
53
16
KJY-M92T0-00 LY DUCT 3ASSY.
1 /
Í
54
17
KJY-M92KA-00 DUCT,HNS
1 /
Í
55
18
KJY-M92KB-00 PANEL 1,LY DUCT3
1 /
Í
56
19
KJY-M92KC-00 PANEL 2,LY DUCT3
1 /
Í
57
20
KJY-M92KD-00 SEPARATOR
1 /
Í
58
21
KJY-M92KF-00 COVER,LY DUCT3
1 /
59
22
KJY-M92KE-00 POST,LY DUCT 3
2 /
Í
60
23
KJY-M92KJ-00 HNS COVER,LY DUCT 3
1 /
Í
61
24
KJY-M92G0-00 Y GREASE PIPE ASSY.
1 /
Í
62
25
KJY-M92G1-00 MANIFOLD,GREASE
1 /
Í
63
26
KJY-M921H-00 GREASE NIPPLE
1 /
Í
64
27
KHY-M266E-00 JOINT
1 /
Í
65
28
KJY-M92KK-00 HNS COVER,LY DUCT 3
1 /
66
29
91312-03004 BOLT HEX.SOCKET HEAD
2
M3X4
67
30
91312-03005 BOLT HEX.SOCKET HEAD
8
M3X5
68
31
91312-04010 BOLT HEX.SOCKET HEAD
14
M4X10
69
32
91312-04030 BOLT HEX.SOCKET HEAD
2
M4X30
70
33
91312-06020 BOLT HEX.SOCKET HEAD
8
M6X20
71
34
98902-03004 SCREW BINDING HEAD
4 72
35
98902-03005 SCREW BINDING HEAD
3 73
36
98902-03010 SCREW BINDING HEAD
2 74
37
90990-11J001 SCREW PAN HEAD W/W
4 75
38
98702-04010 SCREW FLAT HEAD
6 76
15
1
Sensor / Motor / Stay
Wafer Table-axis