YSH20_mpl_je.pdf - 第77页

KJX-1203 1 2 3 4 5 6 7 8 9 10 1 1 12 13 14 15 KV8-M8860-00 KV8-M8883-A0 KV7-M8880-20 KGA-M3801-00 KGA-M3803-00 KV8-M8881-A0 KU4-M8590-00 KV8-M8870-00 K48-M3852-01 K48-M3857-00 K48-M3854-00 KV7-M3823-00 KV7-M8890-00 KGA-M…

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KJX-1107
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M1781-00 PLATE,BOTTOM 8
1 /
39
2
KJY-M1782-00 RING 8,TRAY
1
/
40
3
KJY-M1786-00 PIN
8 /
41
4
KJY-M1787-00 LOCATE PIN,TRAY
4 /
42
5
KJY-M178A-00 CLAMP A,8 INCH ASSY
4
8 inch
/
43
6
KJY-M178A-10 CLAMP A,6 INCH ASSY
4
6 inch
/
44
7
KJY-M178B-00 CLAMP B,8 INCH ASSY
4
8 inch
/
45
8
KJY-M178B-10 CLAMP B,6 INCH ASSY
4
6 inch
/
46
9
KJY-M1781-10 PLATE,BOTTOM 6
1
/
47
10
KJY-M1782-10 RING 6,TRAY
1 /
48
11
KJY-M1741-L0 SIDE PLATE,L
1 /
Í
49
12
KJY-M1744-00 CARD GUIDE
2 /
Í
50
13
KJY-M1742-00 PLATE,BASE
5 /
Í
51
14
KJY-M1741-R0 SIDE PLATE,R
1 /
Í
52
15
KJY-M1743-00 COVER
1 /
Í
53
16
KJY-M174B-L0 BLOCK,L1
1 /
Í
54
17
KJY-M174B-R0 BLOCK,R1
1 /
Í
55
18
KJY-M1748-00 SPRING
2
/
Í
56
19
KJY-M174C-L0 BLOCK,L2
1
/
Í
57
20
KJY-M174C-R0 BLOCK,R2
1 /
Í
58
21
KJY-M1745-01 REAR COVER
1 /
Í
59
22 60
23
KJY-M1747-00 STOPPER,GUIDE
2 /
Í
61
24
KJY-M174D-00 DOG,SENSOR
1 /
Í
62
25
91312-03008 BOLT HEX.SOCKET HEAD
22
M3X8
63
26
91312-03012 BOLT,HEX.SOCKET HEAD
12
M3X12
64
27
91312-03010 BOLT HEX.SOCKET HEAD
12
M3X10
65
28
91312-03005 BOLT HEX.SOCKET HEAD
6
M3X5
66
29 67
30
92903-03600 WASHER,PLAIN
12 68
31
90990-01J039 BOLT,HEX.SOCKET HEAD
14 69
32
98702-03008 SCREW FLAT HEAD
6 70
33
90990-09J004 SCREW,FLAT HEAD
28 71
34
98702-03008 SCREW FLAT HEAD
16 72
35
KJY-M17B0-01 RACK ASSY
1 /
73
36
KJY-M174E-00 STOPPER
2 74
37
KJY-M174F-00 SHEET, STOPPER
2 75
38 76
17
1
Pallet Assy (8/6inch/Rack)
Wafer Pallet
KJX-1203
1 2 3 4 5
6 7 8 9 10
11 12 13
14 15
KV8-M8860-00 KV8-M8883-A0 KV7-M8880-20 KGA-M3801-00 KGA-M3803-00
KV8-M8881-A0 KU4-M8590-00 KV8-M8870-00
K48-M3852-01 K48-M3857-00 K48-M3854-00
KV7-M3823-00 KV7-M8890-00
KGA-M3802-00
18
1
Tools
Tools
KJX-1203
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Uses No. Part No. Part Name Uses
1 KV8-M8860-00 CLEANING KIT Spline shaft cleaner kit 39
2 KV8-M8883-A0 NEEDLE ASSY Nozzle cleaning wire 40
3 KV7-M8880-20 BRUSH, FEEDER Feeder plate cleaning brush 41
4 KGA-M3801-00 CLEANER, LENS Lens cleaner 42
5 KGA-M3803-00 BLOWER Lens blow brush 43
6
KGA-M3802-00 SWAB Cotton swab sticks 44
7
KV8-M8881-A0 NEEDLE CLEANER ASSY
Nozzle cleaning wire handle
45
8
KU4-M8590-00 AIR BLOW TOOL
Air blow gun
46
9
47
10 KV8-M8870-00 SYRYNGE OIL Oil syringe applicator for nozzle holder 48
11 K48-M3852-01 GREASE GUN Grease gun (for Cartlidge ) 49
12 K48-M3857-00 GREASE NOZZLE Grease gun nozzle 50
13 K48-M3854-00 GREASE NOZZLE Grease gun nozzle 51
14 KV7-M3823-00 FLAT LEVEL 0.1mm/m
Adjust the machine in the horizontal position
52
15 KV7-M8890-00 ULTRAS. CLEANER SET For nozzle cleaning 53
16 54
17 55
18
56
19
57
20
58
21 59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
18
1
Tools
Tools