YSH20_mpl_je.pdf - 第76页
KJX-1 107 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. P…
KJX-1107
2
3
4
4
3
4
1
9
33
33
33
32
32
5
6
7
8
10
18
18
23
11
23
25
25
25
25
25
20
25
31
31
24
29
13
13
13
13
12
12
34
34
15
26
26
25
30
30
27
27
27
17
14
27
8 inch 6 inch
19
16
33
33
33
32
32
4
21
31
35
28
36
37
28
17
1
Pallet Assy (8/6inch/Rack)
Wafer Pallet
KJX-1107
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJY-M1781-00 PLATE,BOTTOM 8
1 /
39
2
KJY-M1782-00 RING 8,TRAY
1
/
40
3
KJY-M1786-00 PIN
8 /
41
4
KJY-M1787-00 LOCATE PIN,TRAY
4 /
42
5
KJY-M178A-00 CLAMP A,8 INCH ASSY
4
8 inch
/
43
6
KJY-M178A-10 CLAMP A,6 INCH ASSY
4
6 inch
/
44
7
KJY-M178B-00 CLAMP B,8 INCH ASSY
4
8 inch
/
45
8
KJY-M178B-10 CLAMP B,6 INCH ASSY
4
6 inch
/
46
9
KJY-M1781-10 PLATE,BOTTOM 6
1
/
47
10
KJY-M1782-10 RING 6,TRAY
1 /
48
11
KJY-M1741-L0 SIDE PLATE,L
1 /
Í
49
12
KJY-M1744-00 CARD GUIDE
2 /
Í
50
13
KJY-M1742-00 PLATE,BASE
5 /
Í
51
14
KJY-M1741-R0 SIDE PLATE,R
1 /
Í
52
15
KJY-M1743-00 COVER
1 /
Í
53
16
KJY-M174B-L0 BLOCK,L1
1 /
Í
54
17
KJY-M174B-R0 BLOCK,R1
1 /
Í
55
18
KJY-M1748-00 SPRING
2
/
Í
56
19
KJY-M174C-L0 BLOCK,L2
1
/
Í
57
20
KJY-M174C-R0 BLOCK,R2
1 /
Í
58
21
KJY-M1745-01 REAR COVER
1 /
Í
59
22 60
23
KJY-M1747-00 STOPPER,GUIDE
2 /
Í
61
24
KJY-M174D-00 DOG,SENSOR
1 /
Í
62
25
91312-03008 BOLT HEX.SOCKET HEAD
22
M3X8
63
26
91312-03012 BOLT,HEX.SOCKET HEAD
12
M3X12
64
27
91312-03010 BOLT HEX.SOCKET HEAD
12
M3X10
65
28
91312-03005 BOLT HEX.SOCKET HEAD
6
M3X5
66
29 67
30
92903-03600 WASHER,PLAIN
12 68
31
90990-01J039 BOLT,HEX.SOCKET HEAD
14 69
32
98702-03008 SCREW FLAT HEAD
6 70
33
90990-09J004 SCREW,FLAT HEAD
28 71
34
98702-03008 SCREW FLAT HEAD
16 72
35
KJY-M17B0-01 RACK ASSY
1 /
73
36
KJY-M174E-00 STOPPER
2 74
37
KJY-M174F-00 SHEET, STOPPER
2 75
38 76
17
1
Pallet Assy (8/6inch/Rack)
Wafer Pallet
KJX-1203
1 2 3 4 5
6 7 8 9 10
11 12 13
14 15
KV8-M8860-00 KV8-M8883-A0 KV7-M8880-20 KGA-M3801-00 KGA-M3803-00
KV8-M8881-A0 KU4-M8590-00 KV8-M8870-00
K48-M3852-01 K48-M3857-00 K48-M3854-00
KV7-M3823-00 KV7-M8890-00
KGA-M3802-00
18
1
Tools
Tools